Kumar Nirmal, Haviar Stanislav, Zeman Petr
Department of Physics and NTIS-European Centre of Excellence, Faculty of Applied Sciences, University of West Bohemia, Pilsen 301 00, Czech Republic.
Nanomaterials (Basel). 2021 Dec 20;11(12):3456. doi: 10.3390/nano11123456.
The growing hydrogen industry is stimulating an ongoing search for new materials not only for hydrogen production or storage but also for hydrogen sensing. These materials have to be sensitive to hydrogen, but additionally, their synthesis should be compatible with the microcircuit industry to enable seamless integration into various devices. In addition, the interference of air humidity remains an issue for hydrogen sensing materials. We approach these challenges using conventional reactive sputter deposition. Using three consequential processes, we synthesized multilayer structures. A basic two-layer system composed of a base layer of cupric oxide (CuO) overlayered with a nanostructured copper tungstate (CuWO) exhibits higher sensitivity than individual materials. This is explained by the formation of microscopic heterojunctions. The addition of a third layer of palladium oxide (PdO) in forms of thin film and particles resulted in a reduction in humidity interference. As a result, a sensing three-layer system working at 150 °C with an equalized response in dry/humid air was developed.
不断发展的氢能产业正在推动人们持续寻找新型材料，这些材料不仅用于制氢或储氢，还用于氢传感。这些材料必须对氢敏感，但此外，它们的合成应与微电路产业兼容，以便能够无缝集成到各种设备中。此外，空气湿度的干扰仍然是氢传感材料面临的一个问题。我们使用传统的反应溅射沉积来应对这些挑战。通过三个连续的过程，我们合成了多层结构。由氧化铜（CuO）基层和纳米结构的钨酸铜（CuWO）覆盖层组成的基本双层系统比单一材料表现出更高的灵敏度。这可以通过微观异质结的形成来解释。以薄膜和颗粒形式添加第三层氧化钯（PdO）可减少湿度干扰。结果，开发出了一种在150°C下工作、在干燥/潮湿空气中具有均衡响应的传感三层系统。
