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压电-热耦合驱动仿生型粘滑双向旋转执行器用于微纳操作。

Piezoelectric-Thermal Coupling Driven Biomimetic Stick-Slip Bidirectional Rotary Actuator for Nanomanipulation.

机构信息

School of Mechanical and Aerospace Engineering, Jilin University, Changchun 130025, China.

Key Laboratory of CNC Equipment Reliability Ministry of Education, Jilin University, Changchun 130025, China.

出版信息

Nano Lett. 2022 Jan 12;22(1):453-460. doi: 10.1021/acs.nanolett.1c04296. Epub 2021 Dec 29.

DOI:10.1021/acs.nanolett.1c04296
PMID:34964352
Abstract

Substantial improvement of rotation driving accuracy is urgently needed and facing challenges. Miniature bidirectional rotary actuators with high-precision and controllable fallback rate require novel driving principles. Here, on the basis of a proposed biomimetic stick-slip motion principle, a novel piezoelectric-thermal coupling bidirectional rotary actuator was developed. The integrated mantis grasping leglike biomimetic claws and heating rods could realize the clockwise macroscopic rotation and anticlockwise macroscopic fallback of a cylindrical rotator, generated by piezoelectric stick-slip and thermal expansion, respectively. The rotation fallback was effectively inhibited at relatively lower frequencies and higher voltages, as a slight fallback rate of 0.095 was confirmed in term of 0.5 Hz and 80 V. An extraordinary piezoelectric-driven macroscopic rotation resolution of 0.2 μrad and thermal-induced microscopic resolution of 0.00073°/°C were experimentally revealed with the aid of real-time observation of the clockwise slow sticking and anticlockwise instantaneous slipping processes by using three-dimensional optical imaging.

摘要

迫切需要大幅提高旋转驱动精度,并面临挑战。具有高精度和可控回弹率的微型双向旋转执行器需要新颖的驱动原理。在这里,基于提出的仿生粘滑运动原理,开发了一种新型的压电-热耦合双向旋转执行器。集成的仿生螳螂捕捉腿状仿生爪和加热棒可以分别通过压电式粘滑和热膨胀实现圆柱形转子的顺时针宏观旋转和逆时针宏观回弹。在相对较低的频率和较高的电压下,旋转回弹得到了有效抑制,在 0.5 Hz 和 80 V 的情况下,回弹率被确认为 0.095。借助三维光学成像实时观察顺时针缓慢粘滑和逆时针瞬时滑动过程,实验揭示了非凡的压电驱动宏观旋转分辨率为 0.2 μrad 和热诱导微观分辨率为 0.00073°/°C。

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