Xu Xiaocan, Xu Ruijia, Lin Yu-Sheng
School of Electronics and Information Technology, Sun Yat-Sen University, Guangzhou, 510006, China.
Nanoscale. 2022 Feb 17;14(7):2722-2728. doi: 10.1039/d1nr07746e.
Vanadium dioxide (VO) based metamaterial perfect absorbers (MPAs) have high potential application values in sensing gas molecules. However, a tuning mechanism temperature manipulation lacks the compatibility with electronic devices. In this study, a voltage-controllable device is proposed by integrating an MPA and micro-electro-mechanical system (MEMS) based microheater for CO gas sensing application. The MPA is composed of a metal-dielectric-metal (MDM) structure and tailored to form an H-shaped metamaterial. The central bar of the H-shaped metamaterial is composed of a VO material, which exhibits perfect absorption in the CO gas absorption spectrum, , at a wavelength of 2.70 μm. The intergated microheater is patterned by using fractal theory to provide high heating temperature and high uniformity of surface temperature. By precisely driving a DC bias voltage on the microheater, the MPA is heated and it can exhibit switchable optical properties with high efficiency. These results provide a strategy to open an avenue for sensors, absorbers, switches, and programmable devices in infrared wavelength range applications.
基于二氧化钒（VO）的超材料完美吸收体（MPA）在气体分子传感方面具有很高的潜在应用价值。然而，通过温度控制的调谐机制与电子设备不兼容。在本研究中，通过将MPA与基于微机电系统（MEMS）的微型加热器集成，提出了一种用于CO气体传感应用的电压可控装置。MPA由金属-电介质-金属（MDM）结构组成，并经过定制形成H形超材料。H形超材料的中心条由VO材料组成，该材料在2.70μm波长的CO气体吸收光谱中表现出完美吸收。集成的微型加热器采用分形理论进行图案化，以提供高加热温度和高表面温度均匀性。通过在微型加热器上精确施加直流偏置电压，MPA被加热，并且可以高效地展现出可切换的光学特性。这些结果为在红外波长范围应用中的传感器、吸收体、开关和可编程器件开辟了一条途径提供了一种策略。
