Dang Nhat Minh, Wang Zhao-Ying, Lin Chi-Hang, Lin Ming-Tzer
Graduate Institute of Precision Engineering, National Chung Hsing University Taichung, Taichung 402, Taiwan.
Aeronautical Systems Research Division, National Chung-Shan Institute of Science and Technology, Taoyuan 325, Taiwan.
Nanomaterials (Basel). 2022 Jan 20;12(3):329. doi: 10.3390/nano12030329.
Thin metal films are critical elements in nano- and micro-fabricated technologies. The texture orientation of thin films has a significant effect on applied devices. For Face-Centered Cubic (FCC) metal thin films, when the critical thickness is reached, the texture orientation can transform from (111) to (100) based on the model related to the balance between interfacial energy and strain energy. This research focused on the texture transformation of thin films under two conditions: (1) with or without an adhesion layer in the thin film and (2) with or without initial stress applied through a four-point bending load. In the experiment, two samples (silicon/silver and silicon/titanium/silver) were used to apply different initial stress/strain values and different annealing times. After annealing, an X-ray Diffractometer (XRD) was used to ascertain the preferred orientation of the thin films and the percentage of (111) and (100). Finally, Electron Back-Scattered Diffraction (EBSD) was used to observe the grain size of the thin films. The results showed that, regardless of the existence of an adhesion layer, texture transformation occurred, and this was relatively significant with Ti adhesion layers. Further, the initial stress was found to be small compared to the internal stress; thus, the initial stress imposed in the tests in this research was not significantly influenced by the texture transformation.
薄金属膜是纳米和微制造技术中的关键元件。薄膜的织构取向对应用器件有显著影响。对于面心立方（FCC）金属薄膜，当达到临界厚度时，基于与界面能和应变能平衡相关的模型，织构取向可从（111）转变为（100）。本研究聚焦于薄膜在两种条件下的织构转变：（1）薄膜中有无粘附层；（2）通过四点弯曲载荷施加或不施加初始应力。在实验中，使用两个样品（硅/银和硅/钛/银）来施加不同的初始应力/应变值和不同的退火时间。退火后，使用X射线衍射仪（XRD）确定薄膜的择优取向以及（111）和（100）的百分比。最后，使用电子背散射衍射（EBSD）观察薄膜的晶粒尺寸。结果表明，无论有无粘附层，都会发生织构转变，并且对于钛粘附层而言这种转变相对显著。此外，发现初始应力与内应力相比很小；因此，本研究测试中施加的初始应力对织构转变没有显著影响。
