Dang Nhat Minh, Wang Zhao-Ying, Chou Yun-Chia, Nguyen Tra Anh Khoa, Dang Thien Ngon, Lin Ming-Tzer
Graduate Institute of Precision Engineering, National Chung Hsing University, Taichung 40749, Taiwan.
Siliconware Precision Industries Co., Ltd., Taichung 427, Taiwan.
Materials (Basel). 2021 Jun 19;14(12):3401. doi: 10.3390/ma14123401.
Al thin film is extensively used in micro-electromechanical systems (MEMS) and electronic interconnections; however, most previous research has concentrated on their quasi-static properties and applied their designs on larger scales. The present study designed a paddle-like cantilever specimen with metal films deposited on the upper surface to investigate the quasi-static properties of Al thin film at room temperature under high vacuum conditions at microscopic scales. Energy loss was determined using a decay technique in the oscillation amplitude of a vibrating structure following resonant excitation. Grain size and film thickness size were strictly controlled considering the quasi-static properties of the films. This study found that the internal friction of ultra-thin and thin Al films was more dependent on the grain boundaries than film thickness.
铝薄膜广泛应用于微机电系统（MEMS）和电子互连领域；然而，以往的大多数研究都集中在它们的准静态特性上，并将其设计应用于更大的尺度。本研究设计了一种桨状悬臂试样，其上表面沉积有金属薄膜，以研究在高真空条件下室温下微观尺度上铝薄膜的准静态特性。能量损失是通过共振激发后振动结构振荡幅度的衰减技术来确定的。考虑到薄膜的准静态特性，严格控制了晶粒尺寸和薄膜厚度尺寸。本研究发现，超薄和薄铝薄膜的内耗更多地取决于晶界而非薄膜厚度。
