使用铜金属有机分解油墨进行直接激光干涉油墨印刷用于纳米制造

Direct Laser Interference Ink Printing Using Copper Metal-Organic Decomposition Ink for Nanofabrication.

作者信息

Park Jun-Han, Lee Jung-Woon, Ma Yong-Won, Kang Bo-Seok, Hong Sung-Moo, Shin Bo-Sung

机构信息

Department of Cogno-Mechatronics Engineering, Pusan National University, Busan 46241, Korea.

Interdisciplinary Department for Advanced Innovative Manufacturing Engineering, Pusan National University, Busan 46241, Korea.

出版信息

Nanomaterials (Basel). 2022 Jan 25;12(3):387. doi: 10.3390/nano12030387.

DOI:10.3390/nano12030387

PMID:35159733

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8838969/

Abstract

In this study, we developed an effective and rapid process for nanoscale ink printing, direct laser interference ink printing (DLIIP), which involves the photothermal reaction of a copper-based metal-organic decomposition ink. A periodically lined copper pattern with a width of 500 nm was printed on a 240 μm-wide line at a fabrication speed of 17 mm/s under an ambient environment and without any pre- or post-processing steps. This pattern had a resistivity of 3.5 μΩ∙cm, and it was found to exhibit a low oxidation state that was twice as high as that of bulk copper. These results demonstrate the feasibility of DLIIP for nanoscale copper printing with fine electrical characteristics.

摘要

在本研究中，我们开发了一种用于纳米级油墨印刷的有效且快速的工艺——直接激光干涉油墨印刷（DLIIP），该工艺涉及基于铜的金属有机分解油墨的光热反应。在环境条件下，以17 mm/s的制造速度，在一条240μm宽的线上印刷出了宽度为500nm的周期性排列的铜图案，且无需任何预处理或后处理步骤。该图案的电阻率为3.5μΩ∙cm，并且发现其呈现出低氧化态，该氧化态是块状铜的两倍。这些结果证明了DLIIP用于具有良好电学特性的纳米级铜印刷的可行性。