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高掺杂锑/氧化锡传感性能的研究

Investigation on Sensing Performance of Highly Doped Sb/SnO.

作者信息

Feng Zhifu, Gaiardo Andrea, Valt Matteo, Fabbri Barbara, Casotti Davide, Krik Soufiane, Vanzetti Lia, Ciana Michele Della, Fioravanti Simona, Caramori Stefano, Rota Alberto, Guidi Vincenzo

机构信息

MNF-Micro Nano Facility, Sensors and Devices Center, Bruno Kessler Foundation, Via Sommarive 18, 38123 Trento, Italy.

Department of Physics and Earth Sciences, University of Ferrara, Via Saragat 1, 44122 Ferrara, Italy.

出版信息

Sensors (Basel). 2022 Feb 6;22(3):1233. doi: 10.3390/s22031233.

Abstract

Tin dioxide (SnO) is the most-used semiconductor for gas sensing applications. However, lack of selectivity and humidity influence limit its potential usage. Antimony (Sb) doped SnO showed unique electrical and chemical properties, since the introduction of Sb ions leads to the creation of a new shallow band level and of oxygen vacancies acting as donors in SnO. Although low-doped SnO:Sb demonstrated an improvement of the sensing performance compared to pure SnO, there is a lack of investigation on this material. To fill this gap, we focused this work on the study of gas sensing properties of highly doped SnO:Sb. Morphology, crystal structure and elemental composition were characterized, highlighting that Sb doping hinders SnO grain growth and decreases crystallinity slightly, while lattice parameters expand after the introduction of Sb ions into the SnO crystal. XRF and EDS confirmed the high purity of the SnO:Sb powders, and XPS highlighted a higher Sb concentration compared to XRF and EDS results, due to a partial Sb segregation on superficial layers of Sb/SnO. Then, the samples were exposed to different gases, highlighting a high selectivity to NO with a good sensitivity and a limited influence of humidity. Lastly, an interpretation of the sensing mechanism vs. NO was proposed.

摘要

二氧化锡(SnO)是气体传感应用中使用最广泛的半导体。然而,缺乏选择性和湿度影响限制了其潜在用途。锑(Sb)掺杂的SnO表现出独特的电学和化学性质,因为Sb离子的引入导致在SnO中产生新的浅能级和作为施主的氧空位。尽管低掺杂的SnO:Sb与纯SnO相比传感性能有所改善,但对这种材料的研究仍然不足。为了填补这一空白,我们将这项工作重点放在了高掺杂SnO:Sb的气敏特性研究上。对其形态、晶体结构和元素组成进行了表征,结果表明Sb掺杂阻碍了SnO晶粒生长并略微降低了结晶度,而在将Sb离子引入SnO晶体后晶格参数增大。X射线荧光光谱法(XRF)和能谱仪(EDS)证实了SnO:Sb粉末的高纯度,X射线光电子能谱(XPS)表明与XRF和EDS结果相比Sb浓度更高,这是由于在Sb/SnO表层存在部分Sb偏析。然后,将样品暴露于不同气体中,结果表明对NO具有高选择性、良好的灵敏度以及湿度影响有限。最后,提出了对NO传感机制的解释。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/7b7c/8840147/adeb1ed377e5/sensors-22-01233-g001.jpg

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