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基于无铅KNN织构陶瓷制备的单束声镊

Single-Beam Acoustic Tweezer Prepared by Lead-Free KNN-Based Textured Ceramics.

作者信息

Quan Yi, Fei Chunlong, Ren Wei, Wang Lingyan, Zhao Jinyan, Zhuang Jian, Zhao Tianlong, Li Zhaoxi, Zheng Chenxi, Sun Xinhao, Zheng Kun, Wang Zhe, Ren Matthew Xinhu, Niu Gang, Zhang Nan, Karaki Tomoaki, Jiang Zhishui, Wen Li

机构信息

School of Microelectronics, Xidian University, Xi'an 710071, China.

Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

出版信息

Micromachines (Basel). 2022 Jan 25;13(2):175. doi: 10.3390/mi13020175.

Abstract

Acoustic tweezers for microparticle non-contact manipulation have attracted attention in the biomedical engineering field. The key components of acoustic tweezers are piezoelectric materials, which convert electrical energy to mechanical energy. The most widely used piezoelectric materials are lead-based materials. Because of the requirement of environmental protection, lead-free piezoelectric materials have been widely researched in past years. In our previous work, textured lead-free (K, Na)NbO (KNN)-based piezoelectric ceramics with high piezoelectric performance were prepared. In addition, the acoustic impedance of the KNN-based ceramics is lower than that of lead-based materials. The low acoustic impedance could improve the transmission efficiency of the mechanical energy between acoustic tweezers and water. In this work, acoustic tweezers were prepared to fill the gap between lead-free piezoelectric materials research and applications. The tweezers achieved 13 MHz center frequency and 89% -6 dB bandwidth. The -6 dB lateral and axial resolution of the tweezers were 195 μm and 114 μm, respectively. Furthermore, the map of acoustic pressure measurement and acoustic radiation calculation for the tweezers supported the trapping behavior for 100 μm diameter polystyrene microspheres. Moreover, the trapping and manipulation of the microspheres was achieved. These results suggest that the KNN-based acoustic tweezers have a great potential for further applications.

摘要

用于微粒非接触操控的声镊在生物医学工程领域引起了关注。声镊的关键部件是压电材料,它能将电能转化为机械能。使用最广泛的压电材料是铅基材料。由于环境保护的要求,无铅压电材料在过去几年中得到了广泛研究。在我们之前的工作中,制备了具有高压电性能的织构化无铅(K,Na)NbO(KNN)基压电陶瓷。此外,KNN基陶瓷的声阻抗低于铅基材料。低声阻抗可以提高声镊与水之间机械能的传输效率。在这项工作中,制备了声镊以填补无铅压电材料研究与应用之间的空白。该声镊实现了13 MHz的中心频率和89%的-6 dB带宽。声镊的-6 dB横向和轴向分辨率分别为195μm和114μm。此外,声镊的声压测量图和声辐射计算支持了对直径为100μm的聚苯乙烯微球的捕获行为。而且,实现了对微球的捕获和操控。这些结果表明,基于KNN的声镊具有很大的进一步应用潜力。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f107/8879455/a177b55ff3c7/micromachines-13-00175-g001.jpg

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