Wang Nianying, Chen Changnan, Chen Pu, Gu Jiebin, Pan Pichao, Han Ruofeng, Liu Min, Li Xinxin
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
School of Information Science and Technology, ShanghaiTech University, Shanghai 201210, China.
Micromachines (Basel). 2022 Feb 18;13(2):325. doi: 10.3390/mi13020325.
A silicon-chip-based 3D metal solenoidal transformer is proposed and developed to achieve AC-DC conversion for integrated power supply applications. With wafer-level micro electromechanical systems (MEMS) fabrication technique to form the metal casting mold and the following micro-casting technique to rapidly (within 6 min) fill molten ZnAl alloy into the pre-micromachined silicon mold, 45-turns primary solenoid and 7-turns secondary solenoid are fabricated in silicon wafers, where the two intertwining solenoids are located at inner deck and outer deck, respectively. Permalloy soft magnetic core is inserted into a pre-etched channel in the silicon chip, which is surrounded by the solenoids. The size of the chip-style transformer is as small as 8.5 mm × 6.6 mm × 2.5 mm. The internal resistance of the primary solenoid is 1.82 Ω and that of the secondary solenoid is 0.16 Ω. The working frequency of the transformer is 60 kHz. Combined with the testing circuit of the switch mode power supply, the DC voltage of 13.02 V is obtained when the input is 110 V at 50 Hz/60 Hz. Furthermore, the on-chip 3D solenoidal transformer is used for lighting four LEDs, which shows great potential for AC-DC power supply. The wafer-level fabricated chip-style solenoidal AC-DC transformer for integrated power supply is advantageous in uniform fabrication, small size and volume applications.
本文提出并开发了一种基于硅芯片的三维金属螺线管变压器，用于实现集成电源应用中的交流-直流转换。利用晶圆级微机电系统（MEMS）制造技术形成金属铸造模具，并采用后续的微铸造技术在6分钟内将熔融的锌铝合金快速填充到预微加工的硅模具中，在硅晶圆上制造了45匝的初级螺线管和7匝的次级螺线管，其中两个相互缠绕的螺线管分别位于内甲板和外甲板。坡莫合金软磁芯插入到硅芯片中预蚀刻的通道内，该通道被螺线管包围。芯片式变压器的尺寸小至8.5毫米×6.6毫米×2.5毫米。初级螺线管的内阻为1.82Ω，次级螺线管的内阻为0.16Ω。变压器的工作频率为60kHz。结合开关模式电源的测试电路，当输入为50Hz/60Hz的110V时，可获得13.02V的直流电压。此外，片上三维螺线管变压器用于点亮四个发光二极管，这显示了其在交流-直流电源方面的巨大潜力。用于集成电源的晶圆级制造的芯片式螺线管交流-直流变压器在均匀制造、小尺寸和体积应用方面具有优势。
