• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利：CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法，用中文像聊天一样搜索，搜遍4000万医学文献。AI智能推荐，让科研检索更轻松。

立即免费搜索

文件翻译

保留排版，准确专业，支持PDF/Word/PPT等文件格式，支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述，25分钟生成高质量综述，智能提取关键信息，辅助科研写作。

立即免费体验

基于液态铸造的微机电系统磁通门传感器

MEMS Fluxgate Sensor Based on Liquid Casting.

作者信息

Yang Ying, Xu Wei, Chen Guangyuan, Jin Zhenhu, Wang Dandan, Mai Zhihong, Xing Guozhong, Chen Jiamin

机构信息

State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.

School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.

出版信息

Micromachines (Basel). 2023 Nov 26;14(12):2159. doi: 10.3390/mi14122159.

DOI:10.3390/mi14122159
PMID:38138328
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10745360/
Abstract

Compared with electroplating, liquid casting enables the rapid formation of a three-dimensional solenoid coil with a narrower line width and greater thickness, which proves advantageous in enhancing the comprehensive performance of the micro-electromechanical system (MEMS) fluxgate sensor. For this reason, a MEMS fluxgate sensor based on liquid casting with a closed-loop Fe-based amorphous alloy core is proposed. Based on the process parameters of liquid casting, the structure of the MEMS fluxgate sensor was designed. Utilizing MagNet to build the simulation model, the optimal excitation conditions and sensitivity were obtained. According to the simulation model, a highly sensitive MEMS fluxgate sensor based on liquid casting was fabricated. The resulting sensor exhibits a sensitivity of 2847 V/T, a noise of 306 pT/√Hz@1 Hz, a bandwidth of DC-10.5 kHz, and a power consumption of 43.9 mW, which shows high sensitivity and low power consumption compared with other MEMS fluxgates in similar size.

摘要

与电镀相比，液态铸造能够快速形成具有更窄线宽和更大厚度的三维螺线管线圈，这在提高微机电系统（MEMS）磁通门传感器的综合性能方面具有优势。基于此，提出了一种基于液态铸造的具有闭环铁基非晶合金磁芯的MEMS磁通门传感器。根据液态铸造的工艺参数，设计了MEMS磁通门传感器的结构。利用MagNet建立仿真模型，获得了最佳激励条件和灵敏度。根据仿真模型，制作了一种基于液态铸造的高灵敏度MEMS磁通门传感器。所得传感器的灵敏度为2847 V/T，噪声为306 pT/√Hz@1 Hz，带宽为DC - 10.5 kHz，功耗为43.9 mW，与其他类似尺寸的MEMS磁通门相比，具有高灵敏度和低功耗的特点。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/49f85e53df41/micromachines-14-02159-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/caccef11aaa8/micromachines-14-02159-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/29c1179afede/micromachines-14-02159-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/038cbb555a73/micromachines-14-02159-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/19aad0b0f334/micromachines-14-02159-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/197a91600a76/micromachines-14-02159-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/47dd57d95c4b/micromachines-14-02159-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/396d6ca286d5/micromachines-14-02159-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/bddeea71e164/micromachines-14-02159-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/63329b44bb1c/micromachines-14-02159-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/d16fb96c5b72/micromachines-14-02159-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/331bd202ba81/micromachines-14-02159-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/685956d01f4d/micromachines-14-02159-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/49f85e53df41/micromachines-14-02159-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/caccef11aaa8/micromachines-14-02159-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/29c1179afede/micromachines-14-02159-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/038cbb555a73/micromachines-14-02159-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/19aad0b0f334/micromachines-14-02159-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/197a91600a76/micromachines-14-02159-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/47dd57d95c4b/micromachines-14-02159-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/396d6ca286d5/micromachines-14-02159-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/bddeea71e164/micromachines-14-02159-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/63329b44bb1c/micromachines-14-02159-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/d16fb96c5b72/micromachines-14-02159-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/331bd202ba81/micromachines-14-02159-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/685956d01f4d/micromachines-14-02159-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6f7a/10745360/49f85e53df41/micromachines-14-02159-g013.jpg

相似文献

1
MEMS Fluxgate Sensor Based on Liquid Casting.基于液态铸造的微机电系统磁通门传感器
Micromachines (Basel). 2023 Nov 26;14(12):2159. doi: 10.3390/mi14122159.
2
Wide Linearity Range and Highly Sensitive MEMS-Based Micro-Fluxgate Sensor with Double-Layer Magnetic Core Made of Fe⁻Co⁻B Amorphous Alloy.基于Fe⁻Co⁻B非晶合金双层磁芯的宽线性范围和高灵敏度MEMS微磁通门传感器
Micromachines (Basel). 2017 Nov 30;8(12):352. doi: 10.3390/mi8120352.
3
High-sensitivity low-noise miniature fluxgate magnetometers using a flip chip conceptual design.采用倒装芯片概念设计的高灵敏度低噪声微型磁通门磁力计。
Sensors (Basel). 2014 Jul 30;14(8):13815-29. doi: 10.3390/s140813815.
4
A sensitive and innovative detection method for rapid C-reactive proteins analysis based on a micro-fluxgate sensor system.基于微磁通门传感器系统的快速 C 反应蛋白分析的敏感创新检测方法。
PLoS One. 2018 Mar 30;13(3):e0194631. doi: 10.1371/journal.pone.0194631. eCollection 2018.
5
Fabrication and Characterization of a Flexible Fluxgate Sensor with Pad-Printed Solenoid Coils.具有丝网印刷螺线管线圈的柔性磁通门传感器的制造与表征
Sensors (Basel). 2020 Apr 16;20(8):2275. doi: 10.3390/s20082275.
6
A 3-Axis Miniature Magnetic Sensor Based on a Planar Fluxgate Magnetometer with an Orthogonal Fluxguide.一种基于带有正交磁通引导器的平面磁通门磁力计的三轴微型磁传感器。
Sensors (Basel). 2015 Jun 19;15(6):14727-44. doi: 10.3390/s150614727.
7
Improved Performance of Fundamental Mode Orthogonal Fluxgate Using a Micro-Patterned Meander-Shaped Ribbon Core.采用微结构蜿蜒 ribbon 磁芯提高基模正交磁通门的性能。
Sensors (Basel). 2019 Nov 20;19(23):5058. doi: 10.3390/s19235058.
8
MEMS-Casting Fabricated Chip-Style 3D Metal Solenoidal Transformers towards Integrated Power Supply.面向集成电源的微机电系统铸造制造的芯片式三维金属螺线管变压器
Micromachines (Basel). 2022 Feb 18;13(2):325. doi: 10.3390/mi13020325.
9
Improving the Electrical Contact Performance for Amorphous Wire Magnetic Sensor by Employing MEMS Process.采用微机电系统工艺提高非晶丝磁传感器的电接触性能
Micromachines (Basel). 2018 Jun 14;9(6):299. doi: 10.3390/mi9060299.
10
Design and Fabrication of a Miniaturized GMI Magnetic Sensor Based on Amorphous Wire by MEMS Technology.基于微机电系统（MEMS）技术的非晶丝微型巨磁阻抗（GMI）磁传感器的设计与制造
Sensors (Basel). 2018 Mar 1;18(3):732. doi: 10.3390/s18030732.

引用本文的文献

1
A High-Precision Temperature Compensation Method for TMR Weak Current Sensors Based on FPGA.一种基于FPGA的TMR弱电流传感器高精度温度补偿方法
Micromachines (Basel). 2024 Nov 22;15(12):1407. doi: 10.3390/mi15121407.
2
Editorial for the Special Issue on Micro and Nanosensors: Fabrication, Applications and Performance Enhancements.微纳传感器特刊社论：制造、应用与性能提升
Micromachines (Basel). 2024 Sep 2;15(9):1124. doi: 10.3390/mi15091124.

本文引用的文献

1
Design of Integrated Micro-Fluxgate Magnetic Sensors: Advantages and Challenges of Numerical Analyses.集成微磁通门磁传感器的设计：数值分析的优势和挑战。
Sensors (Basel). 2022 Jan 26;22(3):961. doi: 10.3390/s22030961.
2
Wide Linearity Range and Highly Sensitive MEMS-Based Micro-Fluxgate Sensor with Double-Layer Magnetic Core Made of Fe⁻Co⁻B Amorphous Alloy.基于Fe⁻Co⁻B非晶合金双层磁芯的宽线性范围和高灵敏度MEMS微磁通门传感器
Micromachines (Basel). 2017 Nov 30;8(12):352. doi: 10.3390/mi8120352.