基于液态铸造的微机电系统磁通门传感器

MEMS Fluxgate Sensor Based on Liquid Casting.

作者信息

Yang Ying, Xu Wei, Chen Guangyuan, Jin Zhenhu, Wang Dandan, Mai Zhihong, Xing Guozhong, Chen Jiamin

机构信息

State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.

School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.

出版信息

Micromachines (Basel). 2023 Nov 26;14(12):2159. doi: 10.3390/mi14122159.

DOI:10.3390/mi14122159

PMID:38138328

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10745360/

Abstract

Compared with electroplating, liquid casting enables the rapid formation of a three-dimensional solenoid coil with a narrower line width and greater thickness, which proves advantageous in enhancing the comprehensive performance of the micro-electromechanical system (MEMS) fluxgate sensor. For this reason, a MEMS fluxgate sensor based on liquid casting with a closed-loop Fe-based amorphous alloy core is proposed. Based on the process parameters of liquid casting, the structure of the MEMS fluxgate sensor was designed. Utilizing MagNet to build the simulation model, the optimal excitation conditions and sensitivity were obtained. According to the simulation model, a highly sensitive MEMS fluxgate sensor based on liquid casting was fabricated. The resulting sensor exhibits a sensitivity of 2847 V/T, a noise of 306 pT/√Hz@1 Hz, a bandwidth of DC-10.5 kHz, and a power consumption of 43.9 mW, which shows high sensitivity and low power consumption compared with other MEMS fluxgates in similar size.

摘要

与电镀相比，液态铸造能够快速形成具有更窄线宽和更大厚度的三维螺线管线圈，这在提高微机电系统（MEMS）磁通门传感器的综合性能方面具有优势。基于此，提出了一种基于液态铸造的具有闭环铁基非晶合金磁芯的MEMS磁通门传感器。根据液态铸造的工艺参数，设计了MEMS磁通门传感器的结构。利用MagNet建立仿真模型，获得了最佳激励条件和灵敏度。根据仿真模型，制作了一种基于液态铸造的高灵敏度MEMS磁通门传感器。所得传感器的灵敏度为2847 V/T，噪声为306 pT/√Hz@1 Hz，带宽为DC - 10.5 kHz，功耗为43.9 mW，与其他类似尺寸的MEMS磁通门相比，具有高灵敏度和低功耗的特点。