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一种微电化学加工纳秒脉冲电源的研制。

Development of a micro-electrochemical machining nanosecond pulse power supply.

作者信息

Chang W J, Wang S Y, Tang H H, Dong B L, Yang Q, Chen J Y, Chen S H

机构信息

School of Mechanical Engineering, Hefei University of Technology, Hefei 230009, China.

出版信息

Rev Sci Instrum. 2022 Feb 1;93(2):024707. doi: 10.1063/5.0076998.

Abstract

Micro-electrochemical machining (micro-ECM) has been widely used for microscale and nanoscale processing of materials. The performance of the nanosecond pulse power supply is directly related to the precision of micro-ECM, which is one of the core technologies for micro-ECM. In this work, a nanosecond pulse power supply, with adjustable pulse frequency, duty cycle, and voltage, was designed with an STM32F103VET6 single-chip microcomputer as the control core and a metal-oxide-semiconductor field-effect transistor as the chopper switch component. The performance test has shown that the power supply can produce a continuous pulse with the highest frequency of 8 MHz, the shortest pulse width of 50 ns, the maximum peak current of 12 A, and the maximum voltage of 10 V. As compared with the power supply reported in the literature, the present power supply demonstrated the enhanced output current and improved waveform of the nanosecond pulse output, which could result in better machining accuracy and efficiency for micro-ECM.

摘要

微电化学加工(micro-ECM)已广泛应用于材料的微纳尺度加工。纳秒脉冲电源的性能直接关系到微电化学加工的精度,而微电化学加工精度是微电化学加工的核心技术之一。在本工作中,设计了一种纳秒脉冲电源,其脉冲频率、占空比和电压均可调,以STM32F103VET6单片机为控制核心,金属氧化物半导体场效应晶体管为斩波开关元件。性能测试表明,该电源能够产生最高频率为8MHz的连续脉冲,最短脉冲宽度为50ns,最大峰值电流为12A,最大电压为10V。与文献报道的电源相比,本电源的纳秒脉冲输出具有增强的输出电流和改善的波形,这可为微电化学加工带来更好的加工精度和效率。

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