School of Electrical Engineering, Hebei University of Science and Technology, Shijiazhuang 050018, China.
Rev Sci Instrum. 2022 Feb 1;93(2):025004. doi: 10.1063/5.0074049.
The multidimensional motion ultrasonic motor with a single spherical stator is studied in this paper. It has the characteristics of miniaturization and can be used in precision motion applications. By bonding six identical pieces of piezoelectric ceramic onto the stator and applying the voltage signal of high frequency, the deformation of the inverse piezoelectric effect is used to excite the stator yaw vibration mode. The orthogonal superposition of the modes of the spherical stator on the driving foot produces elliptical trajectory around X, Y, and Z directions by different excitation methods. According to the yaw vibration mode of the spherical stator, 12 driving feet are designed to drive the rotation of the spherical rotor. The structure and mechanical characteristics of the motor are simulated by using simulation software, and the transient response of the stator driving foot was obtained, which proved its feasibility. Finally, the output performance of the motor in actual operation is given through experiments, which provides a new reference scheme in the field of precise multi-degree-of-freedom motion. At a voltage of 100 V and a frequency of 26.7 kHz, the prototype has a no-load speed of 73, 70, and 114 rpm around X, Y, and Z axes, respectively.
本文研究了一种具有单一球形定子的多维运动超声马达。它具有微型化的特点，可用于精密运动应用。通过将六块相同的压电陶瓷片粘贴在定子上，并施加高频电压信号，利用逆压电效应的变形来激励定子的偏航振动模式。通过不同的激励方法，球形定子在驱动脚处的模式的正交叠加在 X、Y 和 Z 方向上产生椭圆轨迹。根据球形定子的偏航振动模式，设计了 12 个驱动脚来驱动球形转子的旋转。利用仿真软件对电机的结构和机械特性进行了仿真，得到了定子驱动脚的瞬态响应，验证了其可行性。最后，通过实验给出了电机在实际运行中的输出性能，为精密多自由度运动领域提供了一种新的参考方案。在 100V 电压和 26.7kHz 频率下，原型机在 X、Y 和 Z 轴方向上的空载速度分别为 73、70 和 114rpm。
