Design and characteristic analysis of multi-degree-of-freedom ultrasonic motor based on spherical stator.

The multidimensional motion ultrasonic motor with a single spherical stator is studied in this paper. It has the characteristics of miniaturization and can be used in precision motion applications. By bonding six identical pieces of piezoelectric ceramic onto the stator and applying the voltage signal of high frequency, the deformation of the inverse piezoelectric effect is used to excite the stator yaw vibration mode. The orthogonal superposition of the modes of the spherical stator on the driving foot produces elliptical trajectory around X, Y, and Z directions by different excitation methods. According to the yaw vibration mode of the spherical stator, 12 driving feet are designed to drive the rotation of the spherical rotor. The structure and mechanical characteristics of the motor are simulated by using simulation software, and the transient response of the stator driving foot was obtained, which proved its feasibility. Finally, the output performance of the motor in actual operation is given through experiments, which provides a new reference scheme in the field of precise multi-degree-of-freedom motion. At a voltage of 100 V and a frequency of 26.7 kHz, the prototype has a no-load speed of 73, 70, and 114 rpm around X, Y, and Z axes, respectively.