Naz Sidra, Xu Tian-Bing
Department of Mechanical and Aerospace Engineering, Old Dominion University, Norfolk, VA 23529, USA.
Micromachines (Basel). 2024 Sep 21;15(9):1170. doi: 10.3390/mi15091170.
Piezoelectric ultrasonic motors (USMs) are actuators that use ultrasonic frequency piezoelectric vibration-generated waves to transform electrical energy into rotary or translating motion. USMs receive more attention because they offer distinct qualities over traditional magnet-coil-based motors, such as miniaturization, great accuracy, speed, non-magnetic nature, silent operation, straightforward construction, broad temperature operations, and adaptability. This review study focuses on the principle of USMs and their classifications, characterization, fabrication methods, applications, and future challenges. Firstly, the classifications of USMs, especially, standing-wave, traveling-wave, hybrid-mode, and multi-degree-of-freedom USMs, are summarized, and their respective functioning principles are explained. Secondly, finite element modeling analysis for design and performance predictions, conventional and nano/micro-fabrication methods, and various characterization methods are presented. Thirdly, their advantages, such as high accuracy, small size, and silent operation, and their benefits over conventional motors for the different specific applications are examined. Fourthly, the advantages and disadvantages of USMs are highlighted. In addition, their substantial contributions to a variety of technical fields like surgical robots and industrial, aerospace, and biomedical applications are introduced. Finally, their future prospects and challenges, as well as research directions in USM development, are outlined, with an emphasis on downsizing, increasing efficiency, and new materials.
压电超声电机（USM）是一种执行器，它利用超声频率的压电振动产生的波将电能转化为旋转或直线运动。由于压电超声电机相较于传统的基于电磁线圈的电机具有独特的品质，如小型化、高精度、高速度、无磁性、运行安静、结构简单、宽温度运行范围和适应性强等，因此受到了更多关注。本综述研究聚焦于压电超声电机的原理、分类、特性、制造方法、应用以及未来挑战。首先，总结了压电超声电机的分类，特别是驻波型、行波型、混合模式型和多自由度型压电超声电机，并解释了它们各自的工作原理。其次，介绍了用于设计和性能预测的有限元建模分析、传统和纳米/微制造方法以及各种表征方法。第三，研究了它们的优点，如高精度、小尺寸和运行安静，以及在不同特定应用中相对于传统电机的优势。第四，强调了压电超声电机的优缺点。此外，还介绍了它们在手术机器人以及工业、航空航天和生物医学应用等各种技术领域中的重大贡献。最后，概述了它们的未来前景和挑战，以及压电超声电机发展的研究方向，重点在于小型化、提高效率和新材料方面。
