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迈向世界最小重量颗粒物传感器:采用折叠设计的微型虚拟撞击器。

Towards the World's Smallest Gravimetric Particulate Matter Sensor: A Miniaturized Virtual Impactor with a Folded Design.

机构信息

Electrical and Computer Engineering, McGill University, Montreal, QC H3A 0G4, Canada.

MEMS Vision International Inc., Montreal, QC H4P 2R9, Canada.

出版信息

Sensors (Basel). 2022 Feb 23;22(5):1727. doi: 10.3390/s22051727.

Abstract

The increasing air pollution across the globe has given rise to a global health crisis that is increasing at an alarming rate. Every year, millions of people lose their lives due to health risks caused by air pollutants. Hence, there is a pressing need for better solutions to accurately measure the amount of air pollution. This work is aimed at designing a highly compact, accurate, low-cost, self-resettable, and easy-to-use gravimetric-based particulate matter sensor solution for portable applications. Previous attempts have failed to realize true miniaturization, due to the size constraints of the needed-a mechanism that segregates the particulate matters based on their sizes. Our complete particulate matter sensor solution consists of three components (i) a piezoelectric resonating membrane, (ii) a virtual impactor, and (iii) a thermophoretic mechanism to reset the sensor. This paper presents a novel design of the virtual impactor, based on a folded configuration. This helps realize the entire system in a volume of 20 mm × 20 mm × 10 mm. We report here the design, working principles, fabrication, and experimental results of the virtual impactor.

摘要

全球不断增加的空气污染导致了一场以惊人速度加剧的全球健康危机。每年,数以百万计的人因空气污染导致的健康风险而失去生命。因此,迫切需要更好的解决方案来准确测量空气污染的程度。这项工作旨在设计一种高度紧凑、准确、低成本、自复位和易于使用的基于重量的颗粒物传感器解决方案,用于便携式应用。由于需要一种根据颗粒物大小进行分离的机制,因此之前的尝试未能实现真正的小型化。我们完整的颗粒物传感器解决方案由三个组件组成:(i)压电谐振膜,(ii)虚拟撞击器,以及(iii)用于传感器复位的热泳机制。本文提出了一种基于折叠结构的虚拟撞击器的新型设计。这有助于在 20mm×20mm×10mm 的体积内实现整个系统。我们在这里报告虚拟撞击器的设计、工作原理、制造和实验结果。

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