Skolkovo Institute of Science and Technology, Nobel str. 3, Moscow, 121205, Russia.
Center for Photonics and 2D Materials, Moscow Institute of Physics and Technology, Institute Lane 9, Dolgoprudny, 141701, Russia.
Small. 2022 Jun;18(22):e2200476. doi: 10.1002/smll.202200476. Epub 2022 Mar 22.
Advances in material science, bioelectronic, and implantable medicine combined with recent requests for eco-friendly materials and technologies inevitably formulate new challenges for nano- and micropatterning techniques. Overall, the importance of creating micro- and nanostructures is motivated by a large manifold of fundamental and applied properties accessible only at the nanoscale. Lithography is a crucial family of fabrication methods to create prototypes and produce devices on an industrial scale. The pure trend in the miniaturization of critical electronic semiconducting components has been recently enhanced by implementing bio-organic systems in electronics. So far, significant efforts have been made to find novel lithographic approaches and develop old ones to reach compatibility with delicate bio-organic systems and minimize the impact on the environment. Herein, such delicate materials and sophisticated patterning techniques are briefly reviewed.
材料科学、生物电子学和可植入医学的进步，加上对环保材料和技术的最新需求，不可避免地给纳米和微图案技术带来了新的挑战。总的来说，创造微纳米结构的重要性源于只有在纳米尺度才能获得的大量基础和应用特性。光刻是一种至关重要的制造方法家族，可以在工业规模上创建原型和生产设备。在电子学中引入生物有机系统，最近极大地推动了关键电子半导体元件的小型化。迄今为止，已经做出了巨大的努力来寻找新的光刻方法并开发旧的方法，以达到与精细的生物有机系统的兼容性，并最小化对环境的影响。本文简要回顾了这些精细的材料和复杂的图案化技术。
