Yang Cheng, Wang Yin, Fan Wei
Institute of Manufacturing Engineering, Huaqiao University, Xiamen 361021, China.
College of Mechanical Engineering and Automation, Huaqiao University, Xiamen 361021, China.
Micromachines (Basel). 2022 Mar 5;13(3):412. doi: 10.3390/mi13030412.
In order to develop a high-resolution piezoelectric walking actuator with a long stroke for the wafer probe station, this work presents a design of a piezoelectric walking actuator with two auxiliary clamping feet elastically attached to major clamping feet. Its construction was introduced and its operating principle was analyzed. Structure design details were discussed and a prototype was proposed. The prototype was fabricated and tested. The experimental results show that the proposed actuator can operate stably along a 20 mm guider. The proposed design is suitable for precision motion control applications.
为了开发一种用于晶圆探针台的长行程高分辨率压电行走驱动器，本文提出了一种带有两个弹性连接在主夹脚上的辅助夹脚的压电行走驱动器设计。介绍了其结构并分析了其工作原理。讨论了结构设计细节并提出了一个原型。制作并测试了该原型。实验结果表明，所提出的驱动器能够沿着20毫米导轨稳定运行。所提出的设计适用于精密运动控制应用。
