Cai Pengcheng, Xiong Xingyin, Wang Kunfeng, Ma Liangbo, Wang Zheng, Liu Yunfei, Zou Xudong
State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
Micromachines (Basel). 2022 Mar 13;13(3):437. doi: 10.3390/mi13030437.
Mode-localized sensing paradigms applied to accelerometers have recently become popular research subjects. However, the output of mode-localized accelerometers is influenced by environment temperature due to the difference in the thermal properties of the coupling resonators and the temperature dependence of coupling stiffness. To improve the performance of mode-localized accelerometers against temperature, we proposed an in situ self-temperature compensation method by utilizing the resonant frequency besides of amplitude ratios, which can be implied online. Experimental results showed that there were nearly 79-times and 87-times improvement in zeros bias and scale factor, respectively.
应用于加速度计的模式局部化传感范式最近已成为热门的研究课题。然而，由于耦合谐振器的热特性差异和耦合刚度的温度依赖性，模式局部化加速度计的输出会受到环境温度的影响。为了提高模式局部化加速度计的温度性能，我们提出了一种利用除振幅比之外的谐振频率的原位自温度补偿方法，该方法可以在线实现。实验结果表明，零点偏置和比例因子分别有近79倍和87倍的改善。
