Zhang Lansheng, Uzoma Paul C, Xiaoyang Chu, Penkov Oleksiy V, Hu Huan
ZJU-UIUC Institute, International Campus, Zhejiang University, Haining, China.
State Key Laboratory of Fluidic Power and Mechanical Systems, Zhejiang University, Hangzhou, China.
Front Bioeng Biotechnol. 2022 Mar 21;10:872268. doi: 10.3389/fbioe.2022.872268. eCollection 2022.
We report a scalable and cost-effective fabrication approach for constructing bio-inspired micro/nanostructured surfaces. It involves silicon microstructure etching using a deep reactive ion etch (DRIE) method, nanowires deposition glancing angle deposition (GLAD) process, and fluorocarbon thin film deposition. Compared with the smooth, microstructured, and nanostructured surfaces, the hierarchical micro/nanostructured surfaces obtained this method showed the highest water contact angle of ∼161° and a low sliding angle of <10°. It also offered long ice delay times of 2313 s and 1658 s at -5°C and -10°C respectively, more than 10 times longer than smooth surfaces indicating excellent anti-icing properties and offering promising applications in low-temperature environments. These analyses further proved that the surface structures have a significant influence on surface wettability and anti-icing behavior. Hence, the GLAD process which is versatile and cost-effective offers the freedom of constructing nanostructures on top of microstructures to achieve the required objective in the fabrication of micro/nanostructured surfaces when compared to other fabrication techniques.
我们报道了一种用于构建仿生微/纳米结构表面的可扩展且经济高效的制造方法。该方法包括使用深反应离子刻蚀（DRIE）方法进行硅微结构蚀刻、采用掠角沉积（GLAD）工艺沉积纳米线以及沉积氟碳薄膜。与光滑表面、微结构表面和纳米结构表面相比，通过这种方法获得的分级微/纳米结构表面显示出最高约161°的水接触角和小于10°的低滑动角。在-5°C和-10°C时，它还分别具有2313 s和1658 s的长结冰延迟时间，比光滑表面长10倍以上，表明具有优异的防冰性能，并在低温环境中具有广阔的应用前景。这些分析进一步证明了表面结构对表面润湿性和防冰行为有重大影响。因此，与其他制造技术相比，多功能且经济高效的GLAD工艺能够在微结构之上构建纳米结构，从而在微/纳米结构表面制造中实现所需目标。
