Yanagishita Takashi, Hayakawa Tomohiro, Kondo Toshiaki, Masuda Hideki
Department of Applied Chemistry, Tokyo Metropolitan University 1-1 Minamiosawa, Hachioji Tokyo 192-0397 Japan
Department of Mechanical System Engineering, Aichi University of Technology 50-2 Manori, Nishihasama-cho Gamagori Aichi 443-0047 Japan.
RSC Adv. 2021 Jan 7;11(4):2096-2102. doi: 10.1039/d0ra09729b. eCollection 2021 Jan 6.
Anodic porous alumina templates with controlled microscale geometrical structures were prepared by a process combining mask formation and subsequent selective etching of the alumina layer. In this process, the anisotropic etching of anodic porous alumina allows the preparation of anodic porous alumina with microhole array patterns having high aspect ratios. The electrodeposition of Ni using the obtained alumina templates generated an array of Ni micropillars with high aspect ratios. The height of Ni micropillars could also be controlled by adjusting the thickness of the anodic porous alumina. The obtained Ni micropillar array with a high aspect ratio was applied as a mold for imprinting. The ordered microstructures of TiO with high aspect ratios were prepared by imprinting using the Ni mold.
通过结合掩膜形成和随后对氧化铝层进行选择性蚀刻的工艺制备了具有可控微观几何结构的阳极多孔氧化铝模板。在该工艺中，阳极多孔氧化铝的各向异性蚀刻使得能够制备具有高纵横比微孔阵列图案的阳极多孔氧化铝。使用所得氧化铝模板进行镍的电沉积生成了具有高纵横比的镍微柱阵列。镍微柱的高度也可以通过调整阳极多孔氧化铝的厚度来控制。将所得的具有高纵横比的镍微柱阵列用作压印模具。通过使用镍模具进行压印制备了具有高纵横比的TiO有序微观结构。
