Gao Yang, Xiao Ting, Li Qi, Chen Yang, Qiu Xunlin, Liu Jiawen, Bian Yuqing, Xuan Fuzhen
Key Laboratory of Pressure Systems and Safety of MOE, School of Mechanical and Power Engineering, East China University of Science and Technology, Shanghai, 200237, People's Republic of China.
Nanotechnology. 2022 May 20;33(32). doi: 10.1088/1361-6528/ac6812.
In recent years, flexible pressure sensors have caused widespread concern for their extensive applications in human activity and health monitoring, robotics and prosthesis, as well as human-machine interface. Flexible pressure sensors in these applications are required to have a high sensitivity, large detective limit, linear response, fast response time, and mechanical stability. The mechanisms of capacitive, piezoresistive, and piezoelectric pressure sensors and the strategies to improve their performance are introduced. Sensing layers with microstructures have shown capability to significantly improve the performances of pressure sensors. Various fabrication methods for these structures are reviewed in terms of their pros and cons. Besides, the interference caused by environmental stimuli and internal stress from different directions leads to the infidelity of the signal transmission. Therefore, the anti-interference ability of flexible pressure sensors is highly desired. Several potential applications for flexible pressure sensors are also briefly discussed. Last, we conclude the future challenges for facilely fabricating flexible pressure sensors with high performance and anti-interference ability.
近年来，柔性压力传感器因其在人体活动与健康监测、机器人技术与假肢以及人机接口等领域的广泛应用而受到广泛关注。这些应用中的柔性压力传感器需要具备高灵敏度、大检测极限、线性响应、快速响应时间以及机械稳定性。介绍了电容式、压阻式和压电式压力传感器的工作机制以及提高其性能的策略。具有微结构的传感层已显示出显著提高压力传感器性能的能力。针对这些结构的各种制造方法，从其优缺点方面进行了综述。此外，环境刺激和来自不同方向的内应力所引起的干扰会导致信号传输失真。因此，柔性压力传感器的抗干扰能力备受期待。还简要讨论了柔性压力传感器的几个潜在应用。最后，我们总结了在轻松制造具有高性能和抗干扰能力的柔性压力传感器方面未来面临的挑战。
