Yu Runze, Zhang Dacheng
Institute of Microelectronics, Peking University, Beijing 100871, China.
Micromachines (Basel). 2022 Apr 2;13(4):569. doi: 10.3390/mi13040569.
In this paper, we propose a bistable shock structure based on the thermal actuation principle, which overcomes the response time limitation of heating and cooling in typical thermal actuators and enables a rapid release of energy. Thus, force with a steep rising edge can be applied on a target. Using a bistable shock structure to generate on-chip shock loads, we propose an automated and resettable method for shock testing of microstructures. We characterize the microscale shock process by high-speed camera and finite element simulation (FEM). The method can simulate the dynamic response of key structures in MEMS devices under mechanical shock conditions, and therefore, can be used to evaluate shock fracture strength of microstructures.
在本文中，我们提出了一种基于热驱动原理的双稳态冲击结构，该结构克服了典型热致动器中加热和冷却的响应时间限制，并能够快速释放能量。因此，可以在目标上施加具有陡峭上升沿的力。利用双稳态冲击结构产生片上冲击载荷，我们提出了一种用于微结构冲击测试的自动化且可重置的方法。我们通过高速相机和有限元模拟（FEM）对微尺度冲击过程进行表征。该方法可以模拟MEMS器件中关键结构在机械冲击条件下的动态响应，因此可用于评估微结构的冲击断裂强度。
