Zhang Dongpeng, Cai Anjiang, Zhao Yulong, Hu Tengjiang
School of Mechanical and Electrical Engineering, Xi'an University of Architecture and Technology, Xi'an 710055, China.
Shaanxi Key Laboratory of Nano Materials and Technology, Xi'an 710055, China.
Micromachines (Basel). 2021 May 27;12(6):622. doi: 10.3390/mi12060622.
The V-shaped electro-thermal MEMS actuator model, with the human error factor taken into account, is presented in this paper through the cascading ANSYS simulation model and the Fuzzy mathematics calculation model. The Fuzzy mathematics calculation model introduces the human error factor into the MEMS actuator model by using the BP neural network, which effectively reduces the error between ANSYS simulation results and experimental results to less than 1%. Meanwhile, the V-shaped electro-thermal MEMS actuator model, with the human error factor included, will become more accurate as the database of the V-shaped electro-thermal actuator model grows.
本文通过级联ANSYS仿真模型和模糊数学计算模型，提出了考虑人为误差因素的V形电热微机电系统（MEMS）致动器模型。模糊数学计算模型利用BP神经网络将人为误差因素引入MEMS致动器模型，有效将ANSYS仿真结果与实验结果之间的误差降低至1%以下。同时，随着V形电热致动器模型数据库的不断增长，包含人为误差因素的V形电热MEMS致动器模型将变得更加精确。
