Simulation and Optimization of a Planar-Type Micro-Hotplate with SiN-SiO Transverse Composite Dielectric Layer and Annular Heater.

Micro-hotplates (MHPs) have become widely used basic structures in many micro sensors and actuators. Based on the analysis of the general heat transfer model, we propose a new MHP design based on a transversal composite dielectric layer, consisting of different heat transfer materials. Two general proven materials with different thermal conductivity, SiN and SiO, are chosen to form the composite dielectric layer. An annular heater is designed with a plurality of concentric rings connected with each other. The relationship between MHP performance and its geometrical parameters, including temperature distribution and uniformity, thermal deformation, and power dissipation, has been fully investigated using COMSOL simulation. The results demonstrate that the new planar MHP of 2 μm thick with a SiN-SiO composite dielectric layer and annular heater can reach 300 °C at a power of 35.2 mW with a mechanical deformation of 0.132 μm, at a large heating area of about 0.5 mm. The introduction of the composite dielectric layer effectively reduces the lateral heat conduction loss and alleviates the mechanical deformation of the planar MHP compared with a single SiO dielectric layer or SiN dielectric layer.