Department of Physics, Chonnam National University, Gwangju, 61186, Republic of Korea.
Optoelectronics Convergence Research Center, Chonnam National University, Gwangju, 61186, Republic of Korea.
Small. 2022 May;18(20):e2200952. doi: 10.1002/smll.202200952. Epub 2022 Apr 23.
Rapid development of micro-electromechanical systems increases the need for flexible and durable piezoelectric nanogenerators (f-PNG) with high output power density. In this study, a high-performance, flexible, and highly stable f-PNG is prepared by directly growing the Mg-doped semi-insulating GaN nanowires (NWs) on a 30-µm-thick tungsten foil using vapor-liquid-solid growth mechanism. The direct growth of NWs on metal foil extends the overall lifetime of the f-PNG. The semi-insulating GaN NWs significantly enhance the piezoelectric performance of the f-PNG by reducing free electron density. Additionally, the direct integration of NWs on the tungsten foil improves the conductivity, resulting in current enhancement (2.5 mA) with an output power density of 13 mW cm . The piezoelectric performance of the f-PNG is investigated under several bending angles, actuation frequencies, continuous vibrations, and airflow velocities. The maximum output voltage exhibited by the f-PNG is 20 V at a bending angle of 155°. The f-PNG is connected to the backside of an index finger to monitor finger bending behavior by changing the current density. Depending on its flexibility and sensitivity, the f-PNG can be used as a health-monitoring sensor to be mounted on joints (fingers, hands, elbows, and knees) to monitor their repeated bending and relaxation.
微机电系统的快速发展增加了对具有高输出功率密度的柔性和耐用压电纳米发电机(f-PNG)的需求。在本研究中,通过使用汽液固生长机制直接在 30 µm 厚的钨箔上生长 Mg 掺杂半绝缘 GaN 纳米线(NWs),制备了一种高性能、柔性和高度稳定的 f-PNG。NWs 在金属箔上的直接生长延长了 f-PNG 的整体寿命。半绝缘 GaN NWs 通过降低自由电子密度,显著提高了 f-PNG 的压电性能。此外,NWs 直接集成在钨箔上提高了导电性,从而使电流增强(2.5 mA),输出功率密度达到 13 mW cm-2。在几个弯曲角度、激励频率、连续振动和气流速度下研究了 f-PNG 的压电性能。f-PNG 在弯曲角度为 155°时表现出的最大输出电压为 20 V。f-PNG 连接到食指背面,通过改变电流密度来监测手指弯曲行为。根据其灵活性和灵敏度,f-PNG 可用作健康监测传感器,安装在关节(手指、手、肘部和膝盖)上,以监测其反复弯曲和放松。