Charvot Jaroslav, Zazpe Raul, Krumpolec Richard, Rodriguez-Pereira Jhonatan, Pavliňák David, Pokorný Daniel, Klikar Milan, Jelínková Veronika, Macak Jan M, Bureš Filip
Institute of Organic Chemistry and Technology, Faculty of Chemical Technology, University of Pardubice Studentská 573 Pardubice 53210 Czech Republic
Center of Materials and Nanotechnologies, Faculty of Chemical Technology, University of Pardubice Nám. Čs. Legií 565 Pardubice 53002 Czech Republic.
RSC Adv. 2021 Jun 23;11(36):22140-22147. doi: 10.1039/d0ra10239c. eCollection 2021 Jun 21.
The currently limited portfolio of volatile organoselenium compounds used for atomic layer deposition (ALD) has been extended by designing and preparing a series of four-, five- and six-membered cyclic silylselenides. Their fundamental properties were tailored by alternating the ring size, the number of embedded Se atoms and the used peripheral alkyl chains. In contrast to former preparations based on formation of sodium or lithium selenides, the newly developed synthetic method utilizes a direct and easy reaction of elemental selenium with chlorosilanes. Novel 2,2,4,4-tetraisopropyl-1,3,2,4-diselenadisiletane, which features good trade-off between chemical/thermal stability and reactivity, has been successfully used for gas-to-solid phase reaction with MoCl affording MoSe. A thorough characterization of the as-deposited 2D MoSe flakes revealed its out-of-plane orientation and high purity. Hence, the developed four-membered cyclic silylselenide turned out to be well-suited Se-precursor for ALD of MoSe.
通过设计和制备一系列四元、五元及六元环状甲硅烷基硒化物，用于原子层沉积（ALD）的挥发性有机硒化合物目前有限的种类得到了扩展。通过改变环的大小、嵌入硒原子的数量以及所使用的外围烷基链，对它们的基本性质进行了调整。与以前基于形成硒化钠或硒化锂的制备方法不同，新开发的合成方法利用元素硒与氯硅烷直接且简便的反应。新型的2,2,4,4-四异丙基-1,3,2,4-二硒二硅环丁烷在化学/热稳定性和反应活性之间具有良好的平衡，已成功用于与MoCl的气固相反应用于制备MoSe。对沉积后的二维MoSe薄片进行的全面表征揭示了其面外取向和高纯度。因此，所开发的四元环状甲硅烷基硒化物被证明是用于MoSe原子层沉积的合适硒前驱体。
