Charvot Jaroslav, Zazpe Raul, Macak Jan M, Bureš Filip
Institute of Organic Chemistry and Technology, Faculty of Chemical Technology, University of Pardubice, Studentská 573, Pardubice 53210, Czech Republic.
Center of Materials and Nanotechnologies, Faculty of Chemical Technology, University of Pardubice, Nám. Čs. Legií 565, Pardubice 53002, Czech Republic.
ACS Omega. 2021 Mar 4;6(10):6554-6558. doi: 10.1021/acsomega.1c00223. eCollection 2021 Mar 16.
Organoselenium compounds with perspective application as Se precursors for atomic layer deposition have been reviewed. The originally limited portfolio of available Se precursors such as HSe and diethyl(di)selenide has recently been extended by bis(trialkylsilyl)selenides, bis(trialkylstannyl)selenides, cyclic selenides, and tetrakis(,-dimethyldithiocarbamate)selenium. Their structural aspects, property tuning, fundamental properties, and preparations are discussed. It turned out that symmetric four- and six-membered cyclic silyl selenides possess well-balanced reactivity/stability, facile and cost-effective synthesis starting from inexpensive and readily available chlorosilanes, improved resistance toward air and moisture, easy handling, sufficient volatility, thermal resistance, and complete gas-to-solid phase exchange reaction with MoCl, affording MoSe nanostructures. These properties make them the most promising Se precursor developed for atomic layer deposition so far.
对有望用作原子层沉积硒前驱体的有机硒化合物进行了综述。最初可用的硒前驱体种类有限，如硒化氢和二乙基（二）硒化物，最近双（三烷基硅基）硒化物、双（三烷基锡基）硒化物、环状硒化物和四（二甲基二硫代氨基甲酸酯）硒使这一组合得到了扩展。讨论了它们的结构特点、性能调控、基本性质和制备方法。结果表明，对称的四元和六元环状硅基硒化物具有良好的反应活性/稳定性平衡，从廉价易得的氯硅烷出发，合成简便且成本效益高，对空气和湿气的耐受性提高，易于处理，具有足够的挥发性、耐热性，并且与MoCl发生完全的气固相传质反应，生成MoSe纳米结构。这些特性使其成为迄今为止为原子层沉积开发的最有前景的硒前驱体。
