Zheng Shaofeng, Wang Jihao, Meng Wenjie, Zhang Jing, Feng Qiyuan, Wang Ze, Hou Yubin, Lu Qingyou, Lu Yalin
University of Science and Technology of China, Hefei, Anhui 230026, China.
Anhui Province Key Laboratory of Condensed Matter Physics at Extreme Conditions, High Magnetic Field Laboratory and High Magnetic Field Laboratory of Anhui, Hefei, Anhui 230031, China.
Rev Sci Instrum. 2022 Apr 1;93(4):043710. doi: 10.1063/5.0080598.
We present a two-degree-of-freedom piezoelectric motor, which is driven by a simple cross-shaped piezo unit. Here, not only the structure of high novelty and simplicity but also the working principle is new. The cross-shaped piezo unit is sandwiched between top and bottom guiding plates with roughly equal pressing forces applied between the four free ends of the piezo unit and the plates. The working principle is as follows: A pair of opposite arms of the piezo unit quickly and simultaneously expand and contract periodically in the X direction, which results in a vanishing total friction force in the X direction; meanwhile, the other two arms in the Y direction deform slowly in a push-pull manner, which will move the aforementioned X-direction arms a step in the Y direction; then, the Y direction piezo arms restore their initial states slowly one by one. Repeating these actions will produce continuous stepping in the Y direction. Because the structure is symmetric in X and Y directions, we can similarly produce stepping in the X direction. The advantages are obvious: compact, rigid, and planar, which are all important for high stability and, hence, crucial in building an atomically resolved scanning probe microscope.
我们展示了一种二自由度压电马达，它由一个简单的十字形压电单元驱动。在此，不仅结构新颖简单，而且工作原理也是全新的。十字形压电单元夹在顶部和底部导向板之间，在压电单元的四个自由端与导向板之间施加大致相等的压力。其工作原理如下：压电单元的一对相对臂在X方向上快速且同时周期性地伸缩，这导致X方向上的总摩擦力消失；与此同时，另外两个在Y方向上的臂以推拉方式缓慢变形，这将使上述X方向的臂在Y方向上移动一步；然后，Y方向的压电臂逐一缓慢恢复到初始状态。重复这些动作将在Y方向上产生连续的步进。由于该结构在X和Y方向上是对称的，我们可以类似地在X方向上产生步进。其优点显而易见：紧凑、刚性好且呈平面状，这些对于高稳定性都很重要，因此对于构建原子分辨率扫描探针显微镜至关重要。
