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用于高性能电磁干扰屏蔽窗的飞秒激光蚀刻双层金属网

Double-layer metal mesh etched by femtosecond laser for high-performance electromagnetic interference shielding window.

作者信息

Zhang Yaqiang, Dong Hongxing, Li Qisong, Mou Nanli, Chen Lulu, Zhang Long

机构信息

Key Laboratory of Materials for High-Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences Shanghai 201800 China

Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences Beijing 100049 China.

出版信息

RSC Adv. 2019 Jul 17;9(39):22282-22287. doi: 10.1039/c9ra03519b.

Abstract

An excellent transparent electromagnetic interference (EMI) shielding window is proposed and demonstrated theoretically and experimentally. The window is composed of double layers of Au-Ni composite mesh, separated by the quartz-glass substrate. The simulation exhibits that the shielding effectiveness (SE) of the double-layer mesh can be improved by increasing the thickness of the substrate in the low frequency range far below the first interfere valley. The measured SE of the proposed structure reaches over 37.61 dB covering an ultra-wide frequency ranging from 150 MHz to 5 GHz, with a maximal SE of 75.84 dB at 3.58 GHz, while the average optical transmittance of the double-layer mesh maintains ∼76.35% at 400-900 nm. Moreover, femtosecond laser direct writing processing technology is used to manufacture the double-layer metal grids, the fabricated grids are not easy to be scuffed off and has a longer operating life. Such a high-performance EMI shielding window has great potential applications in precision optical monitoring instrument and military devices.

摘要

本文提出了一种优异的透明电磁干扰(EMI)屏蔽窗口,并进行了理论和实验验证。该窗口由双层Au-Ni复合网格组成,中间隔着石英玻璃基板。模拟结果表明,在远低于第一个干涉谷的低频范围内,通过增加基板厚度可以提高双层网格的屏蔽效能(SE)。所提出结构的实测SE在150 MHz至5 GHz的超宽频率范围内达到37.61 dB以上,在3.58 GHz时最大SE为75.84 dB,而双层网格在400 - 900 nm的平均光学透过率保持在76.35%左右。此外,采用飞秒激光直写加工技术制造双层金属网格,所制备的网格不易被刮掉且使用寿命更长。这种高性能的EMI屏蔽窗口在精密光学监测仪器和军事设备中具有巨大的潜在应用价值。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/512f/9066645/17935634799d/c9ra03519b-f1.jpg

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