利用飞秒激光微加工制备高Q值铌酸锂微谐振器
Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining.
作者信息
Lin Jintian, Xu Yingxin, Fang Zhiwei, Wang Min, Song Jiangxin, Wang Nengwen, Qiao Lingling, Fang Wei, Cheng Ya
机构信息
1] State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China [2] University of Chinese Academy of Sciences, Beijing 100049, China.
State Key Laboratory of Modern Optical Instrumentation, Department of Optical Engineering, Zhejiang University, Hangzhou 310027, China.
出版信息
Sci Rep. 2015 Jan 28;5:8072. doi: 10.1038/srep08072.
We report on fabrication of high-Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser direct writing followed by focused ion beam (FIB) milling. The micrometer-scale (diameter ~82 μm) LN resonator possesses a Q factor of ~2.5 × 10(5) around 1550 nm wavelength. The combination of femtosecond laser direct writing with FIB enables high-efficiency, high-precision nanofabrication of high-Q crystalline microresonators.
我们报道了通过飞秒激光直写随后聚焦离子束（FIB）铣削，在二氧化硅基座上制备悬浮的高Q值铌酸锂（LN）回音壁模式（WGM）微谐振器。该微米级（直径约82μm）的LN谐振器在1550nm波长附近具有约2.5×10⁵的品质因数。飞秒激光直写与FIB的结合实现了高Q值晶体微谐振器的高效、高精度纳米制造。
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