Suh Yo-Han, Shin Dong-Wook, Chun Young Tea
Electrical Engineering Division, Department of Engineering, University of Cambridge 9 JJ Thomson Avenue Cambridge CB3 0FA UK
RSC Adv. 2019 Nov 22;9(65):38085-38104. doi: 10.1039/c9ra07514c. eCollection 2019 Nov 19.
Technologies for micro-to-nanometer patterns of solution-based materials (SBMs) contribute to a wide range of practical applications in the fields of electronics and optoelectronics. Here, state-of-the-art micro-to-nanometer scale patterning technologies of SBMs are disseminated. The utilisation of patterning for a wide-range of SBMs leads to a high level of control over conventional solution-based film fabrication processes that are not easily accessible for the control and fabrication of ordered micro-to-nanometer patterns. In this review, various patterning procedures of SBMs, including modified photolithography, direct-contact patterning, and inkjet printing, are briefly introduced with several strategies for reducing their pattern size to enhance the electronic and optoelectronic properties of SBMs explained. We then conclude with comments on future research directions in the field.
基于溶液材料(SBMs)的微纳图案化技术在电子和光电子领域有着广泛的实际应用。在此,将介绍SBMs的最新微纳尺度图案化技术。对多种SBMs进行图案化处理,能够高度控制传统的基于溶液的薄膜制造工艺,而这些工艺在有序微纳图案的控制和制造方面并不容易实现。在本综述中,简要介绍了SBMs的各种图案化工艺,包括改进的光刻技术、直接接触图案化和喷墨打印,并解释了几种减小其图案尺寸以增强SBMs电子和光电子性能的策略。最后,我们对该领域未来的研究方向进行了评论。