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温度驱动的2H α-InSe的α-β相变及增强的电子性能

Temperature-Driven α-β Phase Transformation and Enhanced Electronic Property of 2H α-InSe.

作者信息

Lyu Fengjiao, Li Xuan, Tian Jiamin, Li Zhiwei, Liu Bo, Chen Qing

机构信息

Key Laboratory for the Physics and Chemistry of Nanodevices, School of Electronics, Peking University, Beijing 100871, China.

Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China.

出版信息

ACS Appl Mater Interfaces. 2022 May 12. doi: 10.1021/acsami.2c03270.

Abstract

In recent years, thin layered indium selenide (InSe) has attracted rapidly increasing attention due to its fascinating properties and promising applications. Here, we report the temperature-driven α-β phase transformation and the enhanced electronic property of 2H -InSe. We find that 2H α-InSe transforms to β-InSe when it is heated to a high temperature, and the transformation temperature increases from 550 to 650 K with the thickness decreasing from 67 to 17 nm. Additionally, annealing the sample below the phase transformation temperature can effectively improve the electronic property of a 2H α-InSe field-effect transistor, including increasing the on-state current, decreasing the off-state current, and improving the subthreshold swing. After annealing, not only the contact resistance decreases significantly but also the mobility at 300 K increases more than 2 times to 45.83 cm V s, which is the highest among the reported values. Our results provide an effective method to improve the electrical property and the stability of the InSe nanodevices.

摘要

近年来,薄层硒化铟(InSe)因其迷人的特性和广阔的应用前景而迅速受到越来越多的关注。在此,我们报道了温度驱动的α-β相变以及2H-InSe电子性能的增强。我们发现,2H α-InSe在加热到高温时会转变为β-InSe,且随着厚度从67 nm减小到17 nm,转变温度从550 K升高到650 K。此外,在相变温度以下对样品进行退火可以有效改善2H α-InSe场效应晶体管的电子性能,包括增加导通电流、降低截止电流以及改善亚阈值摆幅。退火后,不仅接触电阻显著降低,而且300 K时的迁移率增加了两倍多,达到45.83 cm² V⁻¹ s⁻¹,这是已报道值中的最高值。我们的结果为改善InSe纳米器件的电学性能和稳定性提供了一种有效方法。

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