Carneiro J O, Machado F, Pereira M, Teixeira V, Costa M F, Ribeiro Artur, Cavaco-Paulo Artur, Samantilleke A P
Centre of Physics, University of Minho Azurém Campus 4800-058 Guimarães Portugal
Centre of Biological Engineering, University of Minho Gualtar Campus 4710-057 Braga Portugal.
RSC Adv. 2018 Nov 6;8(65):37254-37266. doi: 10.1039/c8ra07490a. eCollection 2018 Nov 1.
This work is devoted to the study of the influence of different anodic aluminium oxide (AAO) morphologies on the sensitivity and performance of an AAO-based capacitive touch sensor. The AAO structures were fabricated in a cylindrical homemade anodization cell made from a solid polycarbonate billet a lathe machining process. The AAO morphologies were obtained from the anodization of Al foil by using three different types of electrolyte (sulphuric acid, oxalic acid and phosphoric acid) and their morphologies are reported and compared using scanning electron microscopy (SEM) micrographs and current-time characteristic curves. The sensors were fabricated by integrating the AAO structure with a nanotextured gold thin film deposited over the AAO layer by thermal evaporation, thus realizing a type of metal/insulator/metal parallel-plate capacitance sensor. It is demonstrated that AAO morphologies have influence on the performance of the AAO-based capacitive touch sensors. The variation of the capacitance of the sensors is investigated in this work for the AAO structures produced from anodization in an attempt to select anodizing conditions for a biological application aiming to detect small microorganisms such as bacterial colonies of .
这项工作致力于研究不同形态的阳极氧化铝（AAO）对基于AAO的电容式触摸传感器的灵敏度和性能的影响。AAO结构是在由实心聚碳酸酯坯料通过车床加工工艺制成的圆柱形自制阳极氧化池中制造的。通过使用三种不同类型的电解质（硫酸、草酸和磷酸）对铝箔进行阳极氧化获得AAO形态，并使用扫描电子显微镜（SEM）显微照片和电流-时间特性曲线对其形态进行报告和比较。通过将AAO结构与通过热蒸发沉积在AAO层上的纳米纹理化金薄膜集成来制造传感器，从而实现一种金属/绝缘体/金属平行板电容传感器。结果表明，AAO形态对基于AAO的电容式触摸传感器的性能有影响。在这项工作中，针对阳极氧化产生的AAO结构研究了传感器电容的变化，试图选择用于生物应用的阳极氧化条件，以检测诸如细菌菌落等小微生物。
