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纳米多孔阳极氧化铝的制备与应用综述

Fabrication and application of nanoporous anodic aluminum oxide: a review.

作者信息

Liu Sixiang, Tian Junlong, Zhang Wang

机构信息

Hunan Key Laboratory of Micro-Nano Energy Materials and Devices, Laboratory for Quantum Engineering and Micro-Nano Energy Technology, School of Physics and Optoelectronic, Xiangtan University, Hunan 411105, People's Republic of China.

State Key Laboratory of Metal Matrix Composites, Shanghai Jiao Tong University, 800 Dongchuan Road, Shanghai 200240, People's Republic of China.

出版信息

Nanotechnology. 2021 Mar 10;32(22). doi: 10.1088/1361-6528/abe25f.

Abstract

Due to the unique optical and electrochemical properties, large surface area, tunable properties, and high thermal stability, nanoporous anodic aluminum oxide (AAO) has become one of the most popular materials with a large potential to develop emerging applications in numerous areas, including biosensors, desalination, high-risk pollutants detection, capacitors, solar cell devices, photonic crystals, template-assisted fabrication of nanostructures, and so on. This review covers the mechanism of AAO formation, manufacturing technology, the relationship between the properties of AAO and fabrication conditions, and applications of AAO. Properties of AAO, like pore diameter, interpore distance, wall thickness, and anodized aluminum layer thickness, can be fully controlled by fabrication conditions, including electrolyte, applied voltage, anodizing and widening time. Generally speaking, the pore diameter of AAO will affect its specific application to a large extent. Moreover, manufacturing technology like one/two/multi step anodization, nanoimprint lithography anodization, and pulse/cyclic anodization also have a major impact on overall array arrangement. The review aims to provide a perspective overview of the relationship between applications and their corresponding AAO pore sizes, systematically. And the review also focuses on the strategies by which the structures and functions of AAO can be utilized.

摘要

由于具有独特的光学和电化学性质、大表面积、可调节性质以及高热稳定性,纳米多孔阳极氧化铝(AAO)已成为最受欢迎的材料之一,在众多领域开发新兴应用具有巨大潜力,包括生物传感器、海水淡化、高风险污染物检测、电容器、太阳能电池器件、光子晶体、纳米结构的模板辅助制造等等。本综述涵盖了AAO的形成机制、制造技术、AAO性质与制备条件之间的关系以及AAO的应用。AAO的性质,如孔径、孔间距、壁厚和阳极氧化铝层厚度,可以通过制备条件完全控制,包括电解质、施加电压、阳极氧化和扩孔时间。一般来说,AAO的孔径在很大程度上会影响其具体应用。此外,诸如一步/两步/多步阳极氧化、纳米压印光刻阳极氧化和脉冲/循环阳极氧化等制造技术也对整体阵列排列有重大影响。该综述旨在系统地提供应用与其相应AAO孔径之间关系的全景概述。并且该综述还聚焦于利用AAO结构和功能的策略。

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