Durbach Sebastien, Krauss Falk T, Hoffmann Marius, Lehmann Viktor, Reinhardt Hendrik, Sundermeyer Jörg, Hampp Norbert
Department of Chemistry, University of Marburg, Hans-Meerwein Strasse 4, 35032 Marburg, Germany.
ACS Nano. 2022 Jul 26;16(7):10412-10421. doi: 10.1021/acsnano.2c00671. Epub 2022 May 24.
Laser-based surface processing is an established way for the maskless generation of surface structures and functionalities on a large variety of materials. Laser-driven periodic surface texturing and structuring of thin films is reported for metallic-, semiconductive-, and polymeric films. Here, we introduce subwavelength surface patterning of metal-organic thin films of [MoS(SCNBu)], a MoS precursor. Accurate control of one- and two-dimensional (1D and 2D) periodic patterns is achieved on silicon wafers with a pulsed 532 nm ns laser. With suitable combinations of laser polarization, laser pulse energy, the thickness of the SiO passivation layer, and the MoS precursor's thin film thickness, high-quality 1D and 2D self-organized periodic structures are obtained in virtually unlimited areas. The material redistribution related to the pattern formation is thermally driven at low laser energies. Increasing pulse energies beyond a threshold level, in our experiments a factor of 2, fully converts the precursor to MoS.
基于激光的表面处理是一种在多种材料上无掩膜生成表面结构和功能的成熟方法。据报道，激光驱动的周期性表面纹理化和薄膜结构化可用于金属、半导体和聚合物薄膜。在此，我们介绍了一种MoS前驱体[MoS(SCNBu)]的金属有机薄膜的亚波长表面图案化。利用脉冲532 nm纳秒激光在硅片上实现了对一维和二维（1D和2D）周期性图案的精确控制。通过激光偏振、激光脉冲能量、SiO钝化层厚度和MoS前驱体薄膜厚度的适当组合，在几乎无限的区域内获得了高质量的1D和2D自组织周期性结构。在低激光能量下，与图案形成相关的材料重新分布是由热驱动的。在我们的实验中，当脉冲能量超过阈值水平（为2倍）时，前驱体完全转化为MoS。
