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通过激光诱导自组装在硅上形成高度有序的铂纳米线阵列

Formation of Highly Ordered Platinum Nanowire Arrays on Silicon via Laser-Induced Self-Organization.

作者信息

Dasbach Michael, Reinhardt Hendrik M, Hampp Norbert A

机构信息

Department of Chemistry, Philipps-University of Marburg, Hans-Meerwein-Str. 4, 35032 Marburg, Germany.

Material Science Center, 35032 Marburg, Germany.

出版信息

Nanomaterials (Basel). 2019 Jul 18;9(7):1031. doi: 10.3390/nano9071031.

Abstract

Laser-induced periodic surface structures (LIPSS) provide an elegant solution for the generation of highly ordered periodic patterns on the surface of solids. In this study, LIPSS are utilized for the formation of periodic platinum nanowire arrays. In a process based on laser-stimulated self-organization, platinum thin films, sputter-deposited onto silicon, are transformed into nanowire arrays with an average periodicity of 538 nm. The width of the platinum nanowires is adjustable in a range from 20 nm to 250 nm by simply adjusting the thickness of the initial platinum thin films in a range from 0.3 nm to 4.3 nm. With increasing width, platinum nanowires show a rising tendency to sink into the surface of the silicon wafer, thus indicating alloying between platinum and silicon upon LIPSS-formation by a nanosecond-pulsed laser. The Pt/silicon wires may be etched away, leaving a complementary nanostructure in the silicon surface.

摘要

激光诱导周期性表面结构(LIPSS)为在固体表面生成高度有序的周期性图案提供了一种巧妙的解决方案。在本研究中,LIPSS被用于形成周期性铂纳米线阵列。在基于激光刺激自组织的过程中,溅射沉积在硅上的铂薄膜被转化为平均周期为538nm的纳米线阵列。通过简单地将初始铂薄膜的厚度在0.3nm至4.3nm范围内进行调整,铂纳米线的宽度可在20nm至250nm范围内调节。随着宽度增加,铂纳米线显示出沉入硅片表面的趋势增强,这表明在通过纳秒脉冲激光形成LIPSS时铂与硅之间发生了合金化。铂/硅线可能会被蚀刻掉,从而在硅表面留下互补的纳米结构。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/1871/6669604/19178b0559e5/nanomaterials-09-01031-g001.jpg

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