Shi Weichao, Tateishi Yuichi, Li Wei, Hawker Craig J, Fredrickson Glenn H, Kramer Edward J
Materials Research Laboratory, ‡Department of Chemistry and Biochemistry, §Materials Department, and ⊥Department of Chemical Engineering, University of California, Santa Barbara, California 93106, United States.
Materials Research Laboratory, Department of Chemistry and Biochemistry, §Materials Department, and ⊥Department of Chemical Engineering, University of California, Santa Barbara, California 93106, United States.
ACS Macro Lett. 2015 Nov 17;4(11):1287-1292. doi: 10.1021/acsmacrolett.5b00712. Epub 2015 Nov 5.
We demonstrate that small domain features (∼13 nm) can be obtained in a series of polystyrene (PS) and poly(lactic acid) (PLA) block copolymers, PS-(PLA) and (PS)-(PLA), that combine miktoarm molecular architectures with large interaction parameters. To supplement the experimental work, we used self-consistent field theory in tandem with the random phase approximation to explore and contrast the phase behavior of AB and AB types of miktoarm block copolymers. Specifically, AB and AB were found to be effective molecular architectures for inducing strong shifts in phase boundaries with copolymer composition and to simultaneously tune domain feature sizes. The performance of these systems is markedly different from the corresponding linear diblock copolymers and indicates the potential of macromolecular architecture control for future applications in lithography.
我们证明，在一系列聚苯乙烯（PS）和聚乳酸（PLA）嵌段共聚物PS-(PLA)和(PS)-(PLA)中，可以获得小尺寸域特征（约13纳米），这些共聚物将多臂分子结构与大相互作用参数相结合。为了补充实验工作，我们将自洽场理论与随机相位近似相结合，以探索和对比AB型和AB型多臂嵌段共聚物的相行为。具体而言，发现AB型和AB型是有效的分子结构，可随着共聚物组成引起相界的强烈移动，并同时调节域特征尺寸。这些体系的性能与相应的线性二嵌段共聚物明显不同，表明了大分子结构控制在光刻未来应用中的潜力。
