Liang Xiaorui, Zhang Yongwei, Xu Fangmeng, Tan Qiulin, Zhang Juan
State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
Micromachines (Basel). 2022 Apr 29;13(5):705. doi: 10.3390/mi13050705.
In the harsh environment of high temperature and high rotation, a single parameter is difficult to satisfy the multi-parameter test requirements of aerospace metallurgy. Therefore, a multi-parameter coplanar integrated surface acoustic wave (SAW) sensor based on Langasite (LGS) is proposed. In this paper, the optimal cut for different measurement parameters is analyzed, and the optimal cut to temperature, pressure and vibration are obtained. The simulation results show that (0°, 138.5°, 25°) LGS has superior second-order temperature sensitivity, the edge of the rectangular sealed cavity is more suitable for pressure sensors, and the optimal cut is (0°, 138.5°, 30°). The stress of the vibration sensor cantilever beam is mainly concentrated on the edge of the fixed end, and the optimal cut is (0°, 138.5°, 35°). Based on the optimal sensitive tangential direction of each sensitive element and the symmetry of the Langasite wafer, the reasonable layout of the coplanar integrated structure with the three parameters of temperature, pressure and vibration is determined. Moreover, according to the optimal orientation selection and reasonable structure layout of each parameter, combined with frequency separation rules, the parameters of interdigital electrode were determined, and the idea of multi-parameter integrated design was simulated and verified.
在高温和高转速的恶劣环境下，单一参数难以满足航空航天冶金的多参数测试要求。因此，提出了一种基于硅酸镓镧（LGS）的多参数共面集成表面声波（SAW）传感器。本文分析了不同测量参数的最佳切割方式，得出了对温度、压力和振动的最佳切割方式。仿真结果表明，（0°，138.5°，25°）LGS具有优异的二阶温度灵敏度，矩形密封腔的边缘更适合作为压力传感器，最佳切割方式为（0°，138.5°，30°）。振动传感器悬臂梁的应力主要集中在固定端边缘，最佳切割方式为（0°，138.5°，35°）。基于各敏感元件的最佳敏感切向方向和硅酸镓镧晶片的对称性，确定了温度、压力和振动三个参数共面集成结构的合理布局。此外，根据各参数的最佳取向选择和合理的结构布局，结合频率分离规则，确定了叉指电极的参数，并对多参数集成设计的思路进行了仿真验证。
