Ye Yizhou, Wan Shu, He Xuefeng
Key Laboratory of Optoelectronic Technology & Systems, Ministry of Education, Chongqing University, Chongqing 400044, China.
Micromachines (Basel). 2022 Apr 30;13(5):720. doi: 10.3390/mi13050720.
In this paper, the effect of wind-induced vibration on measurement range of microcantilever anemometer is investigated for the first time. The microcantilever anemometer is composed of a flexible substrate and a piezoresistor. The wind speed can be detected through the airflow-induced deformation in the flexible substrate. Previous work indicated that the flexible substrate vibrates violently once the wind speed exceeds a critical value, resulting in severe output jitter. This wind-induced vibration limits the measurement range of the anemometer, and the relationship between the anemometer measurement range and its structural parameters has not been explored systematically. Therefore, this paper aims to reveal this relationship theoretically and experimentally, demonstrating that a shorter and thicker cantilever with larger stiffness can effectively suppress the wind-induced vibration, leading to the critical speed rising. By eliminating the wind-induced vibration, the measurement range of the microcantilever anemometer can be increased by up to 697%. These results presented in this paper can pave the way for the design and fabrication of wide-range mechanical anemometers.
本文首次研究了风致振动对微悬臂梁风速仪测量范围的影响。微悬臂梁风速仪由柔性基板和压阻器组成。风速可通过柔性基板中气流引起的变形来检测。先前的研究表明，一旦风速超过临界值，柔性基板就会剧烈振动，导致严重的输出抖动。这种风致振动限制了风速仪的测量范围，并且风速仪测量范围与其结构参数之间的关系尚未得到系统研究。因此，本文旨在从理论和实验上揭示这种关系，证明具有较大刚度的更短、更厚的悬臂梁可以有效抑制风致振动，从而使临界速度提高。通过消除风致振动，微悬臂梁风速仪的测量范围可提高多达697%。本文给出的这些结果可为宽量程机械风速仪的设计和制造铺平道路。
