A stick-slip linear actuator with high speed and nano-resolution by resonance/non-resonance hybrid driving.

To achieve high speed, nano-resolution, and large stroke, a resonance/non-resonance hybrid piezoelectric stick-slip actuator with a lever-type flexure hinge (LTFH-PSSA) is proposed in this work. The actuator can achieve high speed and large stroke in the resonance mode by the stick-slip working principle and achieve nano-resolution in the non-resonant mode by the direct drive working principle. The excitation electrical signals used in the two working modes are the sine waveform and half-sine waveform, respectively. Compared with the traditional sawtooth waveform, the excitation signal of the sine and half-sine waveforms have no sudden change of voltage, which are more conducive to reduce the impact and vibration of the system. Moreover, a series of static analysis and modal analysis of the stator are carried out by the finite element method. The experimental system is built to test the output characteristics of the LTFH-PSSA. In the resonance state by the stick-slip working principle, the impedance analysis and frequency characteristic test of the LTFH-PSSA are carried out, which states that the tested resonance frequency agrees well with the simulated ones. When the locking force, the voltage, and the frequency are 2 N, 100 V, and 1850 Hz, the speed of the LTFH-PSSA is up to 52.71 mm/s, and the backward motion is suppressed completely as well. In the non-resonance state, the resolution can reach 2.19 nm and 2.69 nm in the forward and backward motion, respectively. So far, the proposed actuator ranks first in speed and resolution among all reported LTFH-PSSAs.