Design and Analysis of a 6-DOF Magnetic Suspension Platform with an Improved Permanent Magnetic Array.

For ultra-precision, large stroke, and high start/stop acceleration, a novel 6-DOF magnetic suspension platform with a novel structure of the permanent array is proposed. The structure and the working principle of the novel platform are introduced. An accurate model of the novel structure was established to calculate the magnetic density distribution for obtaining the parameters and performance of the magnetic suspension platform. The analytical model's results were verified by the finite element method. The driving force model of the magnetic suspension platform was established based on the Lorentz force. Twelve laser displacement sensors were applied to perceive the posture and vibration acceleration of the platform. The hardware information and the measurement models were introduced and established based on the layout. Finally, the Lorentz force characteristics of the proposed platform were investigated and compared with the conventional magnetic platform by the finite element analysis. The results show that the average magnetic flux density is 0.54T, the horizontal current stiffness along the -axis is 63.1N/A, the current stiffness along the -axis is 61.6N/A, and the average output torque is 7.2 N*cm of the novel platform, larger than those of the conventional ones.