School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China.
Rev Sci Instrum. 2022 Oct 1;93(10):105001. doi: 10.1063/5.0101319.
Aiming at the complex structure, small output displacement, and low positioning accuracy of the two-degree-of-freedom (2-DOF) precision positioning platform, theoretical analyses and experimental tests are carried out so that the platform has the characteristics of compact structure, large output stroke, and high positioning accuracy. First, to optimize the structural parameters of the positioning platform, a modeling method to improve the modeling accuracy of the compliant mechanism of the positioning platform is proposed. A static model of the positioning platform based on Euler-Bernoulli beam theory and the sixth-order compliance matrix method is established, and the accuracy of the model is verified by simulation. In addition, the single-objective genetic optimization algorithm is used to optimize the structural size parameters of the positioning platform, and the optimal solution set of the structural size parameters of the positioning platform is obtained by taking the displacement amplification rate of the positioning platform as the optimization target. Finally, according to theoretical and simulation analysis and optimization results, an experimental prototype was fabricated, and a series of experimental tests were carried out on the working stroke, displacement magnification, and output stiffness. The experimental results show that the displacement magnification of the positioning platform reaches 3.39, the positioning stroke is 89.2 × 85.9 µm, and the displacement resolutions of the x-axis and y-axis are 35 and 31 nm, respectively. The positioning platform designed in this paper meets the requirements of large output stroke and high positioning accuracy.
针对两自由度（2-DOF）精密定位平台结构复杂、输出位移小、定位精度低的问题，进行了理论分析和实验测试，使平台具有结构紧凑、输出行程大、定位精度高的特点。首先，为了优化定位平台的结构参数，提出了一种提高定位平台柔顺机构建模精度的建模方法。建立了基于欧拉-伯努利梁理论和六阶柔度矩阵法的定位平台静态模型，并通过仿真验证了模型的准确性。此外，采用单目标遗传优化算法对定位平台的结构尺寸参数进行优化，以定位平台的位移放大率为优化目标，得到了定位平台结构尺寸参数的最优解集。最后，根据理论、仿真分析和优化结果，制作了实验样机，并对工作行程、位移放大率和输出刚度进行了一系列实验测试。实验结果表明，定位平台的位移放大率达到 3.39，定位行程为 89.2×85.9µm，x 轴和 y 轴的位移分辨率分别为 35nm 和 31nm。本文设计的定位平台满足大输出行程和高定位精度的要求。
