使用微机电系统（MEMS）传感器检测挥发性有机化合物。

Detection of Volatile Organic Compounds by Using MEMS Sensors.

机构信息

Department of Systems Design Engineering, University of Waterloo, Waterloo, ON N2L 3G1, Canada.

National Center for Electronics and Defense Systems, King Abdulazaiz City for Science and Technology (KACST), Riyadh 12354, Saudi Arabia.

出版信息

Sensors (Basel). 2022 May 28;22(11):4102. doi: 10.3390/s22114102.

DOI:10.3390/s22114102

PMID:35684724

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9185245/

Abstract

We report on the deployment of MEMS static bifurcation (DC) sensors for the detection of volatile organic compounds (VOCs): hydrogen sulfide and formaldehyde. We demonstrate a sensor that can detect as low as a few ppm of hydrogen sulfide. We also demonstrate a sensor array that can selectively detect formaldehyde in the presence of benzene, a closely related interferent. Toward that end, we investigate the sensitivity and selectivity of two detector polymers-polyaniline (PANI) and poly (2,5-dimethyl aniline) (P25DMA)-to both gases. A semiautomatic method is developed to functionalize individual sensors and sensor arrays with the detector polymers. We found that the sensor array can selectively sense 1 ppm of formaldehyde in the presence of benzene.

摘要

我们报告了用于检测挥发性有机化合物 (VOCs) 的 MEMS 静态分叉 (DC) 传感器的部署：硫化氢和甲醛。我们展示了一种能够检测低至 ppm 级别的硫化氢的传感器。我们还展示了一种传感器阵列，它可以在存在苯（一种密切相关的干扰物）的情况下选择性地检测甲醛。为此，我们研究了两种探测器聚合物——聚苯胺 (PANI) 和聚 (2,5-二甲基苯胺) (P25DMA)——对这两种气体的灵敏度和选择性。开发了一种半自动方法来对单个传感器和传感器阵列进行功能化处理。我们发现，传感器阵列可以在存在苯的情况下选择性地检测 ppm 级别的甲醛。