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用于挥发性有机化合物检测及应用的微机电系统、光学微机电系统和纳米光子学技术进展

Advances in MEMS, Optical MEMS, and Nanophotonics Technologies for Volatile Organic Compound Detection and Applications.

作者信息

Li Dongxiao, Zhou Hong, Ren Zhihao, Lee Chengkuo

机构信息

Department of Electrical and Computer Engineering National University of Singapore Singapore 117583 Singapore.

Center for Intelligent Sensors and MEMS National University of Singapore Singapore 117608 Singapore.

出版信息

Small Sci. 2025 Jan 15;5(4):2400250. doi: 10.1002/smsc.202400250. eCollection 2025 Apr.

DOI:10.1002/smsc.202400250
PMID:40657199
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC12245038/
Abstract

Volatile organic compounds (VOCs) are a class of organic compounds with high vapor pressure and low boiling points, widely present in both natural environments and human activities. VOCs released from various sources not only contribute to environmental pollution but also pose threats to ecosystems and human health. Moreover, some VOCs are considered biomarkers in exhaled breath and can be utilized to identify various diseases. Therefore, monitoring and controlling VOC emissions and concentrations are crucial for safeguarding the environment and human health. In recent years, significant advancements have been achieved in micro-electromechanical system (MEMS)-based sensing and optical sensing technologies, offering new avenues for VOC detection. This article provides a comprehensive overview of research progress in MEMS and optical VOC sensors, focusing on their sensing mechanisms and classifications. It then discusses the role of artificial intelligence in enhancing VOC identification and quantification, as well as trends toward sensor miniaturization and intelligence. Furthermore, the article highlights the diverse applications of VOC sensors in medical diagnostics, agricultural food testing, and the Internet of Things. Finally, it emphasizes the opportunities and challenges associated with MEMS and optical VOC sensors, providing valuable insights for practical applications.

摘要

挥发性有机化合物（VOCs）是一类具有高蒸气压和低沸点的有机化合物，广泛存在于自然环境和人类活动中。从各种来源释放的VOCs不仅会造成环境污染，还会对生态系统和人类健康构成威胁。此外，一些VOCs被认为是呼出气体中的生物标志物，可用于识别各种疾病。因此，监测和控制VOC排放及浓度对于保护环境和人类健康至关重要。近年来，基于微机电系统（MEMS）的传感和光学传感技术取得了重大进展，为VOC检测提供了新途径。本文全面概述了MEMS和光学VOC传感器的研究进展，重点介绍了它们的传感机制和分类。然后讨论了人工智能在增强VOC识别和定量方面的作用，以及传感器小型化和智能化的趋势。此外，本文还强调了VOC传感器在医学诊断、农业食品检测和物联网中的各种应用。最后，它强调了与MEMS和光学VOC传感器相关的机遇和挑战，为实际应用提供了有价值的见解。

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