一种基于法布里-珀罗干涉的紧凑型光学微机电系统压力传感器。

A Compact Optical MEMS Pressure Sensor Based on Fabry-Pérot Interference.

作者信息

Qi Yonghong, Zhao Minghui, Li Bo, Ren Ziming, Li Bing, Wei Xueyong

机构信息

State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.

出版信息

Sensors (Basel). 2022 Mar 3;22(5):1973. doi: 10.3390/s22051973.

DOI:10.3390/s22051973

PMID:35271120

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8914618/

Abstract

Pressure sensors have important prospects in wind pressure monitoring of transmission line towers. Optical pressure sensors are more suitable for transmission line towers due to its anti-electromagnetic interference. However, the fiber pressure sensor is not a suitable choice due to expensive and bulky. In this paper, a compact optical Fabry-Pérot (FP) pressure sensor for wind pressure measurement was developed by MEMS technology. The pressure sensor consists of a MEMS sensing chip, a vertical-cavity surface-emitting laser (Vcsel), and a photodiode (PD). The sensing chip is combined with an FP cavity and a pressure sensing diaphragm which adopts the square film and is fabricated by Silicon on Insulator (SOI) wafer. To calibrate the pressure sensor, the experimental platform which consists of a digital pressure gauge, a pressure loading machine, a digital multimeter, and a laser driver was set up. The experimental results show that the sensitivity of the diaphragm is 117.5 nm/kPa. The measurement range and sensitivity of the pressure sensor are 0-700 Pa and 115 nA/kPa, respectively. The nonlinearity, repeatability, and hysteresis of the pressure sensor are 1.48%FS, 2.23%FS, and 1.59%FS, respectively, which lead to the pressure accuracy of 3.12%FS.

摘要

压力传感器在输电线路塔风压监测中具有重要应用前景。光学压力传感器因其抗电磁干扰能力，更适用于输电线路塔。然而，光纤压力传感器因价格昂贵且体积庞大，并非合适之选。本文利用微机电系统（MEMS）技术研制了一种用于风压测量的紧凑型光学法布里-珀罗（FP）压力传感器。该压力传感器由一个MEMS传感芯片、一个垂直腔面发射激光器（Vcsel）和一个光电二极管（PD）组成。传感芯片与一个FP腔和一个压力传感膜片相结合，该膜片采用方形薄膜，由绝缘体上硅（SOI）晶圆制造。为校准压力传感器，搭建了由数字压力计、压力加载机、数字万用表和激光驱动器组成的实验平台。实验结果表明，膜片的灵敏度为117.5 nm/kPa。压力传感器的测量范围和灵敏度分别为0 - 700 Pa和115 nA/kPa。压力传感器的非线性、重复性和滞后性分别为1.48%FS、2.23%FS和1.59%FS，这使得压力测量精度达到3.12%FS。