Sensitivity Improvement of Multi-Slot Subwavelength Bragg Grating Refractive Index Sensors by Increasing the Waveguide Height or Suspending the Sensor.

We present two methods of improving wavelength sensitivity for multi-slot sub-wavelength Bragg grating (MS-SW BG) refractive index sensors. The sensor structure is designed to have high optical mode confinement in the gaps between the silicon pillars whereby the surrounding medium interaction is high, thus improving the sensitivity. Further sensitivity improvements are achieved by increasing the waveguide height or suspending the sensor. The second option, sensor suspension, additionally requires supporting modifications in which case various configurations are considered. After the optimization of the parameters the sensors were fabricated. For the case of a waveguide height increase to 500 nm, the sensitivity of 850 nm/RIU was obtained; for sensor suspension with fully etched holes, 922 nm/RIU; for the case of not fully etched holes, 1100 nm/RIU; with the sensor lengths of about 10 µm for all cases. These values show improvements by 16.5%, 25%, and 50.5%, respectively, compared to the previous result where the height was fixed to 340 nm.