用于高灵敏度折射率传感的多槽光子晶体腔。
Multi-slot photonic crystal cavities for high-sensitivity refractive index sensing.
作者信息
Xu Peipeng, Zheng Jiajiu, Zhou Jun, Chen Yueyang, Zou Chen, Majumdar Arka
出版信息
Opt Express. 2019 Feb 4;27(3):3609-3616. doi: 10.1364/OE.27.003609.
Abstract
We present the design, fabrication, and characterization of a multi-slot photonic crystal (PhC) cavity sensor on the silicon-on-insulator platform. By optimizing the structure of the PhC cavity, most of the light can be distributed in the lower index region; thus, the sensitivity can be dramatically improved. By exposing the cavities to different mass concentrations of NaCl solutions, we obtained that the wavelength shift per refractive index unit (RIU) for the sensor is 586 nm/RIU, which is one of the highest sensitivities achieved in a non-suspended cavity. Furthermore, the size of the sensing region of the reported sensor is only 22.8 μm × 1.5 μm, making the high-sensitivity PhC cavity sensor attractive for the realization of on-chip sensor arrays.
摘要
我们展示了绝缘体上硅平台上的多槽光子晶体（PhC）腔传感器的设计、制造和特性。通过优化PhC腔的结构，大部分光可以分布在低折射率区域；因此，可以显著提高灵敏度。通过将这些腔暴露于不同质量浓度的NaCl溶液中，我们得到该传感器每折射率单位（RIU）的波长偏移为586 nm/RIU，这是在非悬浮腔中实现的最高灵敏度之一。此外，所报道传感器的传感区域尺寸仅为22.8μm×1.5μm，这使得这种高灵敏度的PhC腔传感器对于实现片上传感器阵列具有吸引力。
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2
Sub-wavelength grating for enhanced ring resonator biosensor.用于增强型环形谐振器生物传感器的亚波长光栅
Opt Express. 2016 Jul 11;24(14):15672-86. doi: 10.1364/OE.24.015672.
3
High-Q and high-sensitivity width-modulated photonic crystal single nanobeam air-mode cavity for refractive index sensing.用于折射率传感的高品质高灵敏度宽度调制光子晶体单纳米梁空气模式腔
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4
Focusing sub-wavelength grating couplers with low back reflections for rapid prototyping of silicon photonic circuits.用于硅光子电路快速原型制作的具有低背反射的聚焦亚波长光栅耦合器。
Opt Express. 2014 Aug 25;22(17):20652-62. doi: 10.1364/OE.22.020652.
5
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Opt Express. 2013 Dec 30;21(26):32306-12. doi: 10.1364/OE.21.032306.
6
Suspended ultra-small disk resonator on silicon for optical sensing.硅基悬浮超微盘谐振器用于光学传感。
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7
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10
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Sensors (Basel). 2011;11(2):1972-91. doi: 10.3390/s110201972. Epub 2011 Feb 7.
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