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探究用于可见到近红外探测能力的大规模无孔铟镓锌氧化物的功效:一种实现高性能图像传感器电路的方法。

Probing the Efficacy of Large-Scale Nonporous IGZO for Visible-to-NIR Detection Capability: An Approach toward High-Performance Image Sensor Circuitry.

作者信息

Sen Anamika, Park Heekyeong, Pujar Pavan, Bala Arindam, Cho Haewon, Liu Na, Gandla Srinivas, Kim Sunkook

机构信息

School of Advanced Materials Science & Engineering, Sungkyunkwan University, Suwon-si, Gyeonggi-do 16419, Republic of Korea.

Harvard Institute of Medicine, Harvard Medical School, Harvard University, Brigham and Women's Hospital, Boston, Massachusetts 02115, United States.

出版信息

ACS Nano. 2022 Jun 28;16(6):9267-9277. doi: 10.1021/acsnano.2c01773. Epub 2022 Jun 13.

Abstract

The technological ability to detect a wide spectrum range of illuminated visible-to-NIR is substantially improved for an amorphous metal oxide semiconductor, indium gallium zinc oxide (IGZO), without employing an additional photoabsorber. The fundamentally tuned morphology via structural engineering results in the creation of nanopores throughout the entire thickness of ∼30 nm. See-through nanopores have edge functionalization with vacancies, which leads to a large density of substates near the conduction band minima and valence band maxima. The presence of nanoring edges with a high concentration of vacancies is investigated using chemical composition analysis. The process of creating a nonporous morphology is sophisticated and is demonstrated using a wafer-scale phototransistor array. The performance of the phototransistors is assessed in terms of photosensitivity () and photoresponsivity (); both are of high magnitudes ( = 8.6 × 10 at λ = 638 nm and = 512 mW cm; = 120 A W at = 2 mW cm for the same λ). Additionally, the 7 × 5 array of 35 phototransistors is effective in sensing and reproducing the input image by responding to selectively illuminated pixels.

摘要

对于非晶态金属氧化物半导体铟镓锌氧化物(IGZO)而言,在不使用额外光吸收体的情况下,检测从可见光到近红外光的宽光谱范围的光照的技术能力得到了显著提升。通过结构工程从根本上调整形态,导致在整个约30纳米的厚度上形成纳米孔。通透的纳米孔具有带空位的边缘功能化,这导致在导带极小值和价带极大值附近存在大量亚态。使用化学成分分析研究了具有高浓度空位的纳米环边缘的存在情况。创建无孔形态的过程很复杂,并通过晶圆级光电晶体管阵列进行了演示。根据光敏度()和光响应度()评估光电晶体管的性能;两者都具有很高的量级(在λ = 638纳米且 = 512毫瓦/平方厘米时, = 8.6 × 10;对于相同的λ,在 = 2毫瓦/平方厘米时, = 120安/瓦)。此外,由35个光电晶体管组成的7×5阵列通过对选择性照射的像素做出响应,能够有效地感测和再现输入图像。

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