Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warszawa, Poland.
Department of Optoelectronics, Silesian University of Technology, Ul. B. Krzywoustego 2, 44-110 Gliwice, Poland.
Int J Mol Sci. 2022 Jun 14;23(12):6614. doi: 10.3390/ijms23126614.
The sol−gel dip-coating method is a cost-efficient way for the realization of thin films on a planar substrate. In this work, high-quality, low-loss, and low-surface roughness silica−titania thin films are deposited on a glass substrate with the sol−gel dip-coating method. This platform works in the visible to near-IR wavelength ranges and can be useful for several eye-catching photonic components. The paper is comprised of two parts: the first part deals with the development of a low-cost silica−titania waveguide system, whereas the second part provides detail on the numerical modeling of the SWG waveguide filter and SWG waveguide FP-sensor design. The SWG waveguide NIR-stopband filter can achieve an ER of >40 dB and 3-dB bandwidth of 110 nm designed at optimized parameters. The SWG waveguide-FP structure proposed in this work act as a refractive index sensor where the sensitivity is ~120 nm/RIU by reducing the width of the waveguide. This sensitivity can be further enhanced by reducing the waveguide height. We believe that this work is quite important for the realization of low-cost integrated photonic devices based on the silica−titania platform developed via the sol−gel dip-coating method.
溶胶-凝胶浸渍法是在平面衬底上实现薄膜的一种经济有效的方法。在这项工作中,采用溶胶-凝胶浸渍法在玻璃衬底上沉积了高质量、低损耗和低表面粗糙度的二氧化硅-二氧化钛薄膜。该平台的工作波长范围为可见光到近红外,可用于多种引人注目的光子元件。本文由两部分组成:第一部分涉及低成本的二氧化硅-二氧化钛波导系统的开发,第二部分则详细介绍了 SWG 波导滤波器和 SWG 波导 FP 传感器设计的数值建模。所设计的 SWG 波导近红外截止带滤波器在优化参数下可实现>40 dB 的 ER 和 110nm 的 3 dB 带宽。本文提出的 SWG 波导-FP 结构可用作折射率传感器,通过减小波导的宽度,其灵敏度约为 120nm/RIU。通过减小波导高度,还可以进一步提高灵敏度。我们相信,这项工作对于基于溶胶-凝胶浸渍法开发的二氧化硅-二氧化钛平台实现低成本集成光子器件具有重要意义。