Warsaw University of Technology, Institute of Microelectronics and Optoelectronics, Koszykowa 75, 00-662 Warszawa, Poland.
Silesian University of Technology, Department of Optoelectronics, Krzywoustego 2, 44-100 Gliwice, Poland.
Sensors (Basel). 2021 Nov 9;21(22):7452. doi: 10.3390/s21227452.
In this paper, a novel and cost-effective photonic platform based on silica-titania material is discussed. The silica-titania thin films were grown utilizing the sol-gel dip-coating method and characterized with the help of the prism-insertion technique. Afterwards, the mode sensitivity analysis of the silica-titania ridge waveguide is investigated via the finite element method. Silica-titania waveguide systems are highly attractive due to their ease of development, low fabrication cost, low propagation losses and operation in both visible and near-infrared wavelength ranges. Finally, a ring resonator (RR) sensor device was modelled for refractive index sensing applications, offering a sensitivity of 230 nm/RIU, a figure of merit () of 418.2 RIU, and of 2247.5 at the improved geometric parameters. We believe that the abovementioned integrated photonics platform is highly suitable for high-performance and economically reasonable optical sensing devices.
本文讨论了一种新颖且具有成本效益的基于二氧化硅-二氧化钛材料的光子学平台。利用溶胶-凝胶浸涂法生长了二氧化硅-二氧化钛薄膜,并借助棱镜插入技术对其进行了特性表征。随后,利用有限元法对二氧化硅-二氧化钛脊形波导的模式灵敏度进行了分析。由于易于开发、制造成本低、传播损耗低以及在可见光和近红外波长范围内工作,因此二氧化硅-二氧化钛波导系统极具吸引力。最后,针对折射率传感应用,对环形谐振器(RR)传感器器件进行了建模,在改进的几何参数下,其灵敏度为 230nm/RIU,品质因数(FOM)为 418.2 RIU,数值孔径(NA)为 2247.5。我们相信,上述集成光子学平台非常适合高性能且经济合理的光学传感设备。