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光学薄膜制造技术——迈向集成光子平台的低成本解决方案:现状综述

Optical Thin Films Fabrication Techniques-Towards a Low-Cost Solution for the Integrated Photonic Platform: A Review of the Current Status.

作者信息

Butt Muhammad A, Tyszkiewicz Cuma, Karasiński Paweł, Zięba Magdalena, Kaźmierczak Andrzej, Zdończyk Maria, Duda Łukasz, Guzik Malgorzata, Olszewski Jacek, Martynkien Tadeusz, Bachmatiuk Alicja, Piramidowicz Ryszard

机构信息

Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warszawa, Poland.

Department of Optoelectronics, Silesian University of Technology, ul. B. Krzywoustego 2, 44-110 Gliwice, Poland.

出版信息

Materials (Basel). 2022 Jun 29;15(13):4591. doi: 10.3390/ma15134591.

Abstract

In the past few decades, several methods concerning optical thin films have been established to facilitate the development of integrated optics. This paper provides a brief depiction of different techniques for implementing optical waveguide thin films that involve chemical, physical, and refractive index modification methods. Recent advances in these fabrication methods are also been presented. Most of the methods developed for the realization of the thin-films are quite efficient, but they are expensive and require sophisticated equipment. The major interest of the scientists is to develop simple and cost-effective methods for mass production of optical thin films resulting in the effective commercialization of the waveguide technology. Our research group is focused on developing a silica-titania optical waveguide platform via the sol-gel dip-coating method and implementing active and passive optical elements via the wet etching method. We are also exploring the possibility of using nanoimprint lithography (NIL) for patterning these films so that the fabrication process is efficient and economical. The recent developments of this platform are discussed. We believe that silica-titania waveguide technology developed via the sol-gel dip-coating method is highly attractive and economical, such that it can be commercialized for applications such as sensing and optical interconnects.

摘要

在过去几十年里,已经建立了几种与光学薄膜相关的方法,以促进集成光学的发展。本文简要描述了用于实现光波导薄膜的不同技术,这些技术涉及化学、物理和折射率改性方法。还介绍了这些制造方法的最新进展。为实现薄膜而开发的大多数方法都非常有效,但它们成本高昂且需要精密设备。科学家们的主要兴趣在于开发简单且经济高效的方法来大规模生产光学薄膜,从而实现波导技术的有效商业化。我们的研究小组专注于通过溶胶 - 凝胶浸涂法开发二氧化硅 - 二氧化钛光波导平台,并通过湿法蚀刻法实现有源和无源光学元件。我们还在探索使用纳米压印光刻(NIL)对这些薄膜进行图案化的可能性,以使制造过程高效且经济。讨论了该平台的最新进展。我们相信,通过溶胶 - 凝胶浸涂法开发的二氧化硅 - 二氧化钛波导技术极具吸引力且经济实惠,因此可将其商业化用于传感和光学互连等应用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3576/9267219/64ddd79917ec/materials-15-04591-g001.jpg

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